“星”型射频MEMS四刀四掷开关的设计  

Design and research of 4P4T switch based on star type RF MEMS switch

作　　者：张世义 王姗姗 吴倩楠 余建刚[1,2,3] 王宇 李孟委 ZHANG Shiyi;WANG Shanshan;WU Qiannan;YU Jiangang;WANG Yu;LI Mengwei(Nantong Institute of Intelligent Opto-Mechatronics of North University of China,Nantong 226000,China;School of Instrument and Electronics,North University of China,Taiyuan 030051,China;Academy for Advanced Interdisciplinary Research,North University of China,Taiyuan 030051,China)

机构地区：[1]中北大学南通智能光机电研究院,江苏南通226000 [2]中北大学仪器与电子学院,山西太原030051 [3]中北大学前沿交叉科学研究院,山西太原030051

出　　处：《传感器与微系统》2021年第7期74-77,共4页Transducer and Microsystem Technologies

基　　金：军工双百工艺攻关(JCKY2018408B006);装备发展部新品项目(2018NW0026)。

摘　　要：为了解决传统开关可控通道较少、尺寸较大、插入损耗较高等问题,以射频微机电系统(MEMS)单刀单掷开关为基础,设计了“星”型的射频MEMS四刀四掷开关,可控制多通道信号导通与断开。采用HFSS仿真软件,对设计的器件的插入损耗、隔离度及驻波比等关键参数进行优化。结果表明:当工作频段为DC~26.5 GHz时,射频MEMS四刀四掷开关插损优于1.19 dB@26.5 GHz,隔离度优于31.75 dB@26.5 GHz,驻波比小于1.7,整体尺寸为1.2 mm×2.174 mm×0.51 mm。本文设计的四刀四掷开关具有低插损、小体积、多通道可调等的优点,可与功分器、移相器、延时器、天线等单片集成,用于通信、雷达、导航及微波测试仪器等系统中,实现多通道信号分配、移相、延时及可重构的功能。In order to solve the problems of less controllable channels,larger size and higher insertion loss of traditional switches,a star type radio frequency(RF)micro-electro-mechanical system(MEMS)four-pole four-throw(4P4T)switch is designed on the basis of single-pole single-throw(SPST)RF MEMS switch,which can control the on-off of multi-channel signals.HFSS simulation software is used to optimize the key parameters of the device such as insertion loss,isolation and standing wave ratio.The results show that the insertion loss of this RF MEMS 4P4T switch is better than 1.19 dB@26.5 GHz,the isolation is better than 31.75 dB@26.5 GHz,the standing-wave ratio is less than 1.7,and the overall size is 1.2 mm×2.174 mm×0.51 mm when the frequency range is DC~26.5 GHz.The four-pole four-throw switch has the advantages of low insertion loss,small volume,multi-channel adjustable,etc.It can be integrated with power divider,phase shifter,delay device,antenna and other monolithic chip,and can be used in communication,radar,navigation and microwave test instrument systems to achieve multi-channel signal distribution,phase shift,delay and reconfigurable functions.

关 键 词：射频微机电系统 四刀四掷开关 低插损 可调 多通道 

分 类 号：TN[电子电信]