用于激光雷达的双层梳齿驱动MEMS扫描镜  

MEMS scanning mirror driven by double comb teeth for lidar

作　　者：杜林云 许高斌 花翔 陈兴 马渊明 于永强 Du Linyun;Xu Gaobin;Hua Xiang;Chen Xing;Ma Yuanming;Yu Yongqiang(Micro Electromechanical System Research Center of Engineering and Technology of Anhui Province,School of Microelectronics,Hefei University of Technology,Hefei 230009,China)

机构地区：[1]合肥工业大学微电子学院安徽省MEMS工程技术研究中心,合肥230009

出　　处：《电子测量与仪器学报》2021年第5期8-15,共8页Journal of Electronic Measurement and Instrumentation

基　　金：国家重点研发计划(2020YFB2008900);装备预研教育部联合基金(6141A02022422);安徽省重点研发计划(1804a09020018);安徽高校协同创新(GXXT-2019-030)项目资助。

摘　　要：提出了一种新型双层梳齿驱动的大尺寸、大偏转角度、低驱动电压微机电系统(MEMS)扫描镜的设计方法。该扫描镜设计嵌套式内外双层垂直梳齿结构,梳齿间采用静电排斥力驱动,改进后的S型扭转梁有效地降低敏感轴刚度。基于垂直梳齿驱动理论分析,建立了该扫描镜的理论模型,并利用MAXWELL和ANSYS仿真软件进行了其静态、动态分析与验证,研究了该扫描镜的体硅制备工艺。仿真实验结果表明,在110 V的驱动电压扫描下,该双层梳齿驱动下的MEMS扫描镜可以实现最大偏转角±13.46°;此外,结构的谐振频率为1.79 kHz,远低于其他高阶模态,有效地抑制了其他非工作模态的交叉干扰运动,获得良好的工作带宽。A novel micro electro-mechanical system(MEMS) scanning mirror driven by double-layer combs is proposed here, which posses with a large size, large deflection angle and low drive voltage. The architecture of the MEMS scanning mirror contains a nested inner and outer double-layer vertical comb. The comb teeth are driven by an electrostatic repulsion in this design, and the optimized S-shape torsion beam effectively reduces the stiffness of the sensitive shaft. The theoretical model of the scanning mirror is firstly analyzed based on the theoretical analysis of the vertical comb drive. The static and dynamic analysis and verification are then carried out by using MAXWELL and ANSYS simulation software. The bulk silicon preparation process of the scanning mirror is further explored. The simulation results demonstrate that a maximum deflection angle of ±13.46° can be achieved on this MEMS scanning mirror under a driving voltage of 110 V. In addition, the resonance frequency of the structure reaches to 1.79 kHz, which is much lower than other high-order modes, leading to effectively suppressing the cross-interference motion of other non-working modes and showing a good working bandwidth.

关 键 词：微机电系统 扫描镜 双层垂直梳齿 静电排斥力 S型扭转梁 

分 类 号：TP212[自动化与计算机技术—检测技术与自动化装置] TN953[自动化与计算机技术—控制科学与工程]