基于PSD的非接触式二维动态角度精密测量系统  

High-precision non-contact two-dimensional dynamic angle measurement system based on PSD

作　　者：李波[1,2] 董文博 肖爱民[1,3] 于梦溪 葛文奇 何建国[2,4] LI Bo;DONG Wen-bo;XIAO Ai-min;YU Meng-xi;GE Wen-qi;HE Jian-guo(Technology and Engineering Center for Space Utilization,Chinese Academy of Sciences,Beijing 100094,China;University of Chinese Academy of Sciences,Beijing 101408,China;Key Laboratory for Space Utilization,Chinese Academy of Sciences,Beijing 100094,China;Aerospace Information Research Institute,Chinese Academy of Sciences,Beijing 100094,China)

机构地区：[1]中国科学院空间应用工程与技术中心,北京100094 [2]中国科学院大学,北京101408 [3]中国科学院太空应用重点实验室,北京100094 [4]中国科学院空天信息研究院,北京100094

出　　处：《激光与红外》2021年第6期787-796,共10页Laser & Infrared

摘　　要：非接触式角度测量广泛用于机械制造、精密测量、航空航天等领域。在一种高速振镜的二维角度测试装置中,需要大范围(±10°)、高速率(80 kHz)、高精度的非接触式二维角度测量方式,传统的动态角度测量方式都不能满足要求。基于PSD的高速响应特性,设计了光电反射式二维动态角度高精度测量系统,可以取得更好的技术指标。首先,采用高精度的PSD检测器和激光器等光学器件,可以实现高精度、大范围的非接触式角度测量;此外,利用坐标系变换得到二维机械角度与PSD输出二维位移的关系,并通过FPGA和高速AD采集板实现了高速数据采样,利用数字滤波的方法,大程度的降低了系统的噪声;通过数据插值的方法,对测量数据进行矫正,极大的降低了系统的误差,实现了大范围二维角度的系统误差都在较低水平。通过实验测试,系统可以实现±10°摆角范围的测量,采样频率可达到125 kHz,噪声达到0.001°,系统误差最大0.007°。满足了大范围、高速率、高精度的角度测量要求。Non-contact angle measurement is widely used in machinery manufacturing,high-precision measurement,aerospace and other fields.In a high-speed galvanometer two-dimensional angle measurement device,a large range(±10°),high rate(80 kHz),and high-precision non-contact two-dimensional angle measurement method is required.The traditional dynamic angle measurement method cannot meet the requirements.Based on the high-speed response characteristics of PSD,a photoelectric high-precision non-contact two-dimensional dynamic angle measurement system is designed,which can achieve better measurement performance.First,the use of high-precision PSD detectors and lasers and other optical devices can achieve high-precision and large-wide non-contact two-dimensional angle measurement;in addition,the relationship between 2D mechanical angle and 2D displacement of PSD is obtained by coordinate system transformation,and a high-speed data sampling through FPGA and high-speed AD acquisition board is achieved.The use of digital filtering greatly reduces the noise of the system;through the method of data interpolation,the measurement data is corrected,which greatly reduces the error of the system.The system error of large-scale two-dimensional angle is at a low level.Through experimental testing,the system can achieve±10°swing angle measurement,the sampling frequency can reach 125 kHz,the noise and resolution can reach 0.001°,and the maximum system error is 0.007°.It meets the requirements of large range,high speed and high precision angle measurement.

关 键 词：PSD 精密测量 二维角度测量 高速采样 数据插值 

分 类 号：TP212.9[自动化与计算机技术—检测技术与自动化装置]