飞秒激光制备耐高温蓝宝石内部几何相位波带片(特邀)  

Fabrication of High Temperature Resistant Geometric Phase Element Inside Sapphire by Femtoesecond Laser(Invited)

作　　者：卢轶明 高炳荣[1] 刘学青[1] 陈岐岱[1] LU Yiming;GAO Bingrong;LIU Xueqing;CHEN Qidai(State Key Laboratory of Integrated Optoelectronics,College of Electronic Science and Engineering,Jilin University,Changchun 130012,China)

机构地区：[1]吉林大学电子科学与工程学院集成光电子国家重点实验室,长春130012

出　　处：《光子学报》2021年第6期71-77,共7页Acta Photonica Sinica

基　　金：国家重点研发计划(No.2017YFB1104600)。

摘　　要：针对晶体材料几何相位元件加工难、精度低、效果差等问题,提出了利用飞秒激光诱导纳米条纹技术来实现材料内部几何相位衍射元件的制备。飞秒激光近阈值加工方式有效的提升了加工精度,其精度为340 nm。通过实时调控扫描激光的偏振可以精准控制诱导纳米条纹的方向,进而改变晶体双折射效应的慢轴方向。基于该方法实现了蓝宝石内部几何相位波带片的有效制备,器件形貌良好、无裂纹,可用于高温环境下聚焦。Aiming at the problems of difficult processing,low precision and poor effect of fabricating geometric phase elements in crystal materials,a femtosecond laser-induced nano-grating technology was proposed to fabricate the internal geometric phase diffraction elements.The femtosecond laser nearthreshold processing method effectively improves the processing accuracy and the fabricating accuracy is340 nm.By adjusting the polarization of the scanning laser,the direction of the induced nano-grating can be accurately controlled,leading to the change of the slow axis direction of the crystalline birefringence.Based on this method,the geometric phase Fresnel zone plate in sapphire has been fabricated.The device has a good morphology with no cracks and excellent optical performance,which can be used for focusing in hightemperature environments.

关 键 词：飞秒激光 微光学元件 几何相位 蓝宝石 高温成像 内部加工 

分 类 号：TN249[电子电信—物理电子学]