激光脉宽对玻璃波导性能的影响(特邀)  

Influence of Laser Pulse Width on the Performance of Glass Waveguide(Invited)

作　　者：王映德 于颜豪[1] 田振男 陈岐岱[1] WANG Yingde;YU Yanhao;TIAN Zhennan;CHEN Qidai(State Key Laboratory of Integrated Optoelectronics,College of Electronic Science and Engineering,Jilin University,Changchun 130012,China)

机构地区：[1]吉林大学电子科学与工程学院集成光电子国家重点实验室,长春130012

出　　处：《光子学报》2021年第6期78-83,共6页Acta Photonica Sinica

基　　金：国家重点研发计划(No.2017YFB1104600)。

摘　　要：改变激光脉宽,在硼铝硅酸盐玻璃内直写光波导,研究了脉冲宽度对光波导截面形貌、模场大小及定向耦合器透射比的影响。实验中,采用脉宽为239 fs单模/多模临界功率的激光制备光波导,其截面大小由5.4μm×4.2μm(239 fs)变为5.1μm×2.4μm(700 fs);模场大小由6.2μm×6μm(239 fs)变为5.8μm×4.8μm(700 fs)且传输模式均为单模,模场形状逐渐从圆形变成椭圆形;定向耦合器的透射比在水平偏振下由97.8%(239 fs)变化为70.2%(700 fs),在垂直偏振下由99.2%(239 fs)变化为79.7%(700 fs)。实验发现脉宽在600 fs以上的激光不利于制备性能稳定的玻璃波导。By changing the laser pulse width,the optical waveguide is directly written in boroaluminosilicate glass,and the effects of the pulse width on the section morphology of the optical waveguide,the size of the mode field and the transmission ratio of the directional coupler are studied.In the experiment,a single mode/multi-mode critical power laser with a pulse width of 239 fs is used to fabricate the waveguide.The cross section size of the waveguide changes from 5.4μm×4.2μm(239 fs)to 5.1μm×2.4μm(700 fs).The size of the mode field changed from 6.2μm×6μm(239 fs)to 5.8μm×4.8μm(700 fs)and the transmission modes were single mode.The shape of the mode field gradually changed from round to ellipse.The transmission ratio of the directional coupler changes from 97.8%(239 fs)to70.2%(700 fs)in the horizontal polarization and from 99.2%(239 fs)to 79.7%(700 fs)in the vertical polarization.Experiments have found that the laser with a pulse width of more than 600 fs is not conducive to the preparation of waveguides with stable performance.

关 键 词：飞秒激光 脉冲宽度 能量耦合 玻璃波导 定向耦合器 

分 类 号：TN249[电子电信—物理电子学]