并联六自由度主动减振平台解耦控制策略研究  

Research on Decoupling Control Strategy of Parallel 6-DOF Active Vibration Control Platform

作　　者：刘仁洪[1,2] 王广源 康玲[1,2] 余洁冰 刘磊[1,2] 贺华艳 张俊嵩[1,2] LIU Renhong;WANG Guangyuan;KANG Ling;YU Jiebing;LIU Lei;HE Huayan;ZHANG Junsong(Institute of High Energy Physics,Chinese Academy of Sciences,Beijing 100049,China;Spallation Neutron Source Science Center,Dongguan 523803,China)

机构地区：[1]中国科学院高能物理研究所,北京100049 [2]散裂中子源科学中心,广东东莞523803

出　　处：《原子能科学技术》2021年第7期1338-1344,共7页Atomic Energy Science and Technology

基　　金：国家自然科学基金(11905231);中国科学院粒子加速物理与技术重点实验室资助项目(JSQ2019ZZ03)。

摘　　要：并联六自由度主动减振平台可有效隔离外界低频微振动对加速器BPM及光束线站等精密设备的影响,由于并联六自由度主动减振平台具有很强的耦合特性,需对平台的耦合特性进行分析研究。本文以压电陶瓷驱动器构建并联六自由度主动减振平台,在平台运动学的基础上,采用Newton-Euler法建立了平台的动力学模型。分析了平台各通道间的耦合特性,设计了一种通用的平台解耦控制策略。搭建了实验验证平台,开展次级通道参数测量与减振实验研究。实验结果表明,设计的多通道解耦控制策略是有效的,平台对低频微振动有良好的减振效果。The parallel 6-DOF active vibration control platform can effectively isolate the influence of external low-frequency micro-vibration on precision equipment such as accelerator BPM and beamline station.Because of the parallel 6-DOF active vibration control platform has strong coupling characteristics,it is necessary to analyze and study the coupling characteristics of the platform.In this paper,the parallel 6-DOF active vibration control platform was constructed by piezoelectric ceramic actuator.Based on the kinematics of the platform,the dynamic model of platform was established by Newton-Euler method.The coupling characteristics of each channel of the platform were analyzed,and a general platform decoupling control strategy was designed.An experimental verification platform was built,and the experimental research on secondary channel parameter measurement and vibration was carried out.The experimental results show that the designed multi-channel decoupling control strategy is effective,and the platform has a good damping effect on low-frequency micro-vibration.

关 键 词：低频微振动 并联六自由度主动减振平台 解耦控制 

分 类 号：O328[理学—一般力学与力学基础] TH39[理学—力学]