基于微机械电子技术的黏度测量传感器  

Review on Viscosity Measurement Sensor Based on Micro-electromechanical Systems Technology

作　　者：黄琳雅 赵立波[1,2,3,4] 罗国希[1,2,3,4] 李支康 吴德志 林启敬 杨萍[1,2,3,4] 蒋庄德[1,2,3,4] HUANG Linya;ZHAO Libo;LUO Guoxi;LI Zhikang;WU Dezhi;LIN Qijing;YANG Ping;JIANG Zhuangde(State Key Laboratory for Manufacturing Systems Engineering,Xi'an Jiaotong University,Xi'an 710049;International Joint Laboratory for Micro/Nano Manufacturing and Measurement Technologies,Xi'an Jiaotong University,Xi'an 710049;Xi'an Jiaotong University(Yantai)Research Institute for Intelligent Sensing Technology and System,Xi'an 710049;School of Mechanical Engineering,Xi'an Jiaotong University,Xi'an 710049;Department of Mechanical and Electrical Engineering,Xiamen University,Xiamen 361005)

机构地区：[1]西安交通大学机械制造系统工程国家重点实验室,西安710049 [2]教育部微纳制造与测试技术国际合作联合实验室,西安710049 [3]西安交通大学(烟台)智能传感技术与系统研究院,西安710049 [4]西安交通大学机械工程学院,西安710049 [5]厦门大学机电工程系,厦门361005

出　　处：《机械工程学报》2021年第8期13-22,共10页Journal of Mechanical Engineering

基　　金：国家自然科学基金(51890884,51875449);中央高校基本科研业务费(xpt012020004);国家重大研究计划(2020YFB2009100)资助项目。

摘　　要：黏度作为流体特性的基本问题,在生物化工等诸多工程中是控制生产流程、保证安全生产、进行医学诊断及科学研究的基础性热物数据,为满足各个领域高精度与高效快捷的黏度测量需求,近年来黏度测量手段已不局限于如毛细血管法、旋转法等传统意义的宏观测量方法,基于微纳米尺度的黏度测量技术已展现出其突出的发展与应用前景。微机械电子系统(Microelectromechanical systems,MEMS)技术的蓬勃发展促使黏度测量集成化、智能化与实时性,多样化黏度测量方法不断涌现,其中谐振式黏度测量受到颇为广泛而深入的关注,并显示了瞩目的检测性能。首先回顾传统的黏度测量方法,然后再介绍了基于微机械电子技术的谐振式黏度测量方法,并分别总结了各自的特点。最后,对MEMS谐振式黏度测量方法的发展趋势进行了展望。Viscosity has been regarded as an essential issue of fluid characteristics in a widespread field,such as biochemical engineering,since it is the basic thermal property to control the production process,ensure safe production,and conduct medical diagnosis and scientific research.In order to achieve a high-precision and high-efficiency viscosity measurement in various fields,in recent years,the viscosity measurement methods have not been limited to traditional macro measurements,such as capillary method,and rotational method.But the viscosity measurement technology under micro-nano scale has shown its outstanding development and application prospects.The rapid development of micro-electromechanical systems(MEMS)technology has promoted the viscosity measurement to integration,intelligence and real-time.Meanwhile,diversified viscosity measurement methods have continuously emerged.The resonant viscosity measurement has received extensive and in-depth attention,which has shown remarkable performance.The traditional viscosity measurement methods are briefly recalled,and then the resonant methods for viscosity determination based on microelectromechanical system technology are introduced,with summarizing their outstanding characteristics.Finally,the development trend of viscosity measurement methods based on MEMS resonance technology is prospected.

关 键 词：流体黏度 测量方法 微机械电子系统 谐振 

分 类 号：TP212[自动化与计算机技术—检测技术与自动化装置]