基于LTCC的新型高灵敏度陶瓷压力传感器的研制  

Development of a Novel LTCC-Based Ceramic Pressure Sensor with High Sensitivity

作　　者：刘红雨 LIU Hongyu(China Electronics Technology Group Corporation No.2 Research Institute, Taiyuan 030024, China)

机构地区：[1]中国电子科技集团公司第二研究所,山西太原030024

出　　处：《测试技术学报》2021年第4期340-344,共5页Journal of Test and Measurement Technology

摘　　要：本文提出了一种基于电容敏感机理的新型低温共烧陶瓷(LTCC)压力传感器.与传统制备工艺相比,由于4J33铁-镍-钴合金的使用,这种新型制备方法不仅可以避免压敏腔体的塌陷,而且还能对传感器的性能起到改善作用.结果表明,相同压力下,该传感器敏感膜的形变更小,所以有更高的响应度.并且在0 kPa~100 kPa的压力范围内,灵敏度可达13 kHz/kPa.不仅如此,压力传感器的重复性误差,磁滞误差和非线性都表现出非常好的性能,分别约为4.30%,2.21%和1.80%.A novel low-temperature co-fired ceramic(LTCC)pressure sensor based on capacitance sensitive mechanism is proposed in this paper.Compared with the traditional preparation technology,this approach of using 4J33 iron-nickel-cobalt alloy can not only avoid the collapse of the pressure-sensitive cavity,but also improve the performance of the sensor.The results show that under the same pressure,the deformation of the sensor's sensitive membrane is smaller,so it has higher responsiveness.And in the pressure range of 0 kPz~100 kPa,the pressure sensitivity can reach 13 kHz/kPa.The repeatability error,hysteresis error and non-linearity of the pressure sensor all show very good performance,which are approximately 4.30%,2.21%and 1.80%,respectively.

关 键 词：4J33铁-镍-钴合金 LTCC技术 陶瓷压力传感器 MEMS器件 

分 类 号：TN305[电子电信—物理电子学]