电子束选区熔化加工过程实时检测方法研究  

Study on Real-time Detection Method of Electron Beam Selective Melting Process

作　　者：王家明 殷伯华[1,2,3] 孙博彤 王鹏飞 刘俊标 韩立[1,2,3] WANG Jiaming;YIN Bohua;SUN Botong;WANG Pengfei;LIU Junbiao;HAN Li(Institute of Electrical Engineering,Chinese Academy of Sciences,Beijing 100190,China;University of Chinese Academy of Sciences,Beijing 100049,China;Beijing Key Laboratory of Bioelectromagnetism,Beijing 100190,China)

机构地区：[1]中国科学院电工研究所,北京100190 [2]中国科学院大学,北京100049 [3]生物电磁学北京市重点实验室,北京100190

出　　处：《热加工工艺》2021年第14期54-58,共5页Hot Working Technology

基　　金：国家重点研发计划项目(2018YFB1105203)。

摘　　要：针对电子束选区熔化加工过程和加工工艺缺少有效的实时在线检测和评估方法的问题,提出了一种通过逐层扫描,实时进行二次电子成像,进而根据所得点阵图像解决上述问题的方法。分析了试验方案及基本流程,包括扫描成像控制原理、图像采集以及采样信号处理等,并通过实验验证实时检测方法准确性和可靠性,以及控制系统选择检测区域的能力。此检测方法不仅能有效检测样品表面粗糙程度和微小缺陷,还可为后续改善EBSM工艺参数提供依据。Aiming at the problems of lack of effective,real-time and on-line monitoring and evaluation method for electron beam selective melting(EBSM)processing and processing craft,a method of acquiring real-time secondary electron imaging through layer-by-layer scanning was proposed,the above problems were solved according to the dot matrix image.The testing schemes and the basic procedure were analyzed,including the principle of scanning forming control,image capture and sampling signal processing.The accuracy and reliability of the real-time monitoring method and the ability of the control system to select the testing area were verified by experiments.The testing method can not only detect the surface roughness and micro-defects of the samples effectively,but also provides an important basis for further optimization of EBSM processing parameters.

关 键 词：电子束选区熔化 实时监测 二次电子 

分 类 号：TG441.7[金属学及工艺—焊接]