基于MEMS铂电阻的无线测温系统设计与测试  

Design and measurement of wireless temperature measuring system based on MEMS platinum resistance

作　　者：侯晓伟 武鹏 郑良广 HOU Xiaowei;WU Peng;ZHENG Liangguang(CRRC Transducer Measurement Technology R&D Center,Ningbo CRRC Times Transducer Technology Co.,Ltd.,Ningbo 315021,China)

机构地区：[1]宁波中车时代传感技术有限公司中国中车传感测量技术研发中心,浙江宁波315021

出　　处：《电子设计工程》2021年第16期101-104,109,共5页Electronic Design Engineering

基　　金：国家重点研发计划资助项目(2016YFB1200401);宁波市工业重大科技专项攻关项目(2017B10017)。

摘　　要：针对目前电气化铁路在温度测量方面存在的问题,如供电连接点、列车轴承等位置较分散且不易布线等,设计了基于MEMS薄膜温度传感器和无线收发模块的无线测温微系统。该系统中的MEMS薄膜温度传感器采用金属铂作为热敏材料,并根据技术指标要求设计了相应的软件和硬件电路设计。并对测温微系统进行了相关的性能测试,结果表明各部分的性能均满足设计要求。In view of the current problems in the temperature measurement of electrified railway,such as the power supply connection points,train bearings,etc.,which are relatively scattered and difficult to be wired,the wireless temperature measurement microsystem based on both MEMS thin film temperature sensor and wireless transceiver module is designed.The platinum is used as the thermosensitive material in the MEMS thin film temperature sensor.The software and hardware circuit are designed according to the technical specifications.Then the performance of the temperature measurement microsystem is measured,and the results show that the design of each part meets the requirements.

关 键 词：微机电系统 铂电阻 温度传感器 无线收发 测量系统 

分 类 号：TN384[电子电信—物理电子学]