基于改进六步翻转法的平行平板面形及均匀性绝对检测方法  

Absolute testing of planarity and inhomogeneity with modified six-step method

作　　者：张帅 全海洋[1] 侯溪[1] 胡小川 吴高峰[1] Zhang Shuai;Quan Haiyang;Hou Xi;Hu Xiaochuan;Wu Gaofeng(Institute of Optics and Electronics,Chinese Academy of Sciences,Chengdu,Sichuan 610209,China;University of Chinese Academy of Sciences,Beijing 100049,China)

机构地区：[1]中国科学院光电技术研究所,四川成都610209 [2]中国科学院大学,北京100049

出　　处：《光电工程》2021年第7期23-31,共9页Opto-Electronic Engineering

基　　金：国家自然科学基金面上项目资助(61675209)。

摘　　要：本文提出了一种改进六步翻转法,同时实现平行平板均匀性以及绝对面形的测量,结合相应的稀疏迭代算法,进一步实现高精度的均匀性和绝对面形误差的重构。通过相应的理论分析和实验验证工作,进一步证明了该方法的有效性和达到亚纳米级检测精度的能力。利用本文所提出的方法与传统绝对平面检测方法以及材料均匀性测量方法进行交叉对比,其中绝对平面测量结果之间差异优于1.7 nm RMS,均匀性测量精度差异不超过2.3 nm RMS。实验结果表明了两者具有高度一致性,同时具有较好的重复性,验证了文章提出的方法的准确性。并且根据不确定度分析表明,该方法与传统的透射法相比提高了测量精度。We describe a modified six-step method to simultaneously measure the inhomogeneity of sample plate and the planarity of the four surfaces in an absolute manner,along with a high-efficiency iterative algorithm for data reduction.Combined with the iterative algorithm,the errors of inhomogeneity and flatness can be estimated with pixel-level spatial resolution in a fast and effective manner.The simulation and experiments prove the validity of the method and the measurement capability of reaching sub-nanometer accuracy.The method presented in this paper is cross-compared with traditional absolute testing method and the method of inhomogeneity.The difference between absolute plane measurements is less than 1.7 nm RMS,and the difference of inhomogeneity measurement accuracy is less than 2.3 nm RMS.The experimental results show that these two methods are highly consistent and have good repeatability,which verifies the accuracy of the methods proposed in this paper.Uncertainty analysis indicates that the proposed method improves the measurement uncertainty,compared with the classical transmission method.

关 键 词：光学检测 干涉计量 绝对检测 不确定度评估 

分 类 号：TN247[电子电信—物理电子学]