基于Smith变论域模糊自适应PID蒸发源温度控制  

Temperature Control of Evaporation Source Based on Smith Variable Universe Fuzzy Adaptive PID

作　　者：贺自名 牛江川 张静[2] HE Zi-ming;NIU Jiang-chuan;Zhang Jing(School of Mechanical Engineering,Shijiazhuang Tiedao University,Shijiazhuang 050043,China;Basic Teaching Department,Shijiazhuang Posts and Telecommunications Technical College,Shijiazhuang 050021,China)

机构地区：[1]石家庄铁道大学机械工程学院,河北石家庄050043 [2]石家庄邮电职业技术学院基础教学部,河北石家庄050021

出　　处：《控制工程》2021年第7期1308-1314,共7页Control Engineering of China

基　　金：国家自然科学基金资助项目(11872254)。

摘　　要：在电阻加热式真空蒸发镀膜过程中,需要通过对蒸发源的温度进行控制从而实现蒸发速率的控制。针对真空镀膜系统中蒸发源的温度变化具有非线性、时变性和滞后性的特点,提出了一种基于Smith预估的变论域模糊自适应PID的改进控制算法。基于改进的差分进化算法辨识真空镀膜温控系统的传递函数,结合变论域模糊自适应PID算法和比例控制构成分段控制模型。最后利用MATLAB进行仿真验证,结果表明,相较于Smith预估控制和模糊自适应PID控制算法,改进后的算法具有调节时间短、超调量几乎为零、无稳态误差等特点,对电阻加热式真空镀膜温控系统具有较好的自适应能力。In the process of resistance heating vacuum evaporation coating,it is necessary to control the evaporation rate by controlling the temperature of the evaporation source.In view of the non-linear,time-varying and hysteresis characteristics of the temperature change of evaporation source in vacuum coating system,an improved control algorithm of variable universe fuzzy adaptive PID based on Smith prediction is proposed.Based on the improved differential evolution algorithm to identify the transfer function of vacuum coating temperature control system,combined with variable universe fuzzy adaptive PID algorithm and proportional control to form a piecewise control model.Finally,the MATLAB simulation results show that,compared with Smith predictive control and fuzzy adaptive PID control algorithm,the improved algorithm has the characteristics of short adjustment time,almost zero overshoot,no steady-state error,and has better adaptive ability for resistance heating vacuum coating temperature control system.

关 键 词：电阻加热式真空镀膜 模型辨识 差分进化算法 变论域模糊自适应PID 分段控制 

分 类 号：TP13[自动化与计算机技术—控制理论与控制工程]