外差干涉仪非线性误差补偿抑制与测量研究进展  

Research Progress in Nonlinear Error Compensation Suppression and Measurement of Heterodyne Interferometer

作　　者：张鹏 崔建军[1] Zhang Peng;Cui Jianjun(Institute of Geometric Metrology,National Institute of Metrology,Beijing 100029,China)

机构地区：[1]中国计量科学研究院几何量计量科学研究所,北京100029

出　　处：《激光与光电子学进展》2021年第11期30-42,共13页Laser & Optoelectronics Progress

基　　金：国家自然科学基金面上项目(51675497);北京市自然科学基金面上项目(3162034);国家重点研发计划专项项目(2017YFF0206305);中国计量科学研究院重点领域基本科研项目(AKYZD1804-1)。

摘　　要：由于存在周期性的非线性误差,外差激光干涉仪的测量精度很难提高。对此,首先分析了外差激光干涉仪中非线性误差的来源,包括频率混叠、偏振混叠与鬼影虚反射。然后讨论了非线性误差的补偿与抑制技术,包括干涉信号处理、传统结构改进、偏振光空间分离、调相双零差干涉,接着介绍了非线性误差的测量技术,包括干涉信号处理测量、双相位差分检测、法布里-珀罗干涉仪检测。最后对非线性误差的补偿、抑制和测量技术做了总结与展望,为相关领域的研究提供了参考与借鉴。Due to the periodic nonlinear error,the measurement accuracy of heterodyne laser interferometer is difficult to improve. In this regard,this paper first analyzes the sources of nonlinear errors in heterodyne laser interferometers,including frequency aliasing,polarization aliasing,and ghost ghosting. Second,it discusses nonlinear error compensation and suppression techniques,including interference signal processing,traditional structure improvement,space separation of polarized light,and phase modulation dual-homodyne interference,and then introduces the measurement technology of nonlinear error,including interference signal processing measurement,dual-phase differential detection,and Fabry-Perot interferometer detection. Finally, it summarizes and prospects the compensation, suppression, and measurement technology of nonlinear error,which provides reference for research in related fields.

关 键 词：测量 外差干涉 非线性误差 误差补偿 非线性测量 

分 类 号：TH741[机械工程—光学工程]