工作在一定入射角度范围内镀有增透膜的衍射光学元件的衍射效率研究  

Diffraction Efficiency of Diffractive Optical Elements with Antireflection Coatings Within a Certain Incident Angle Range

作　　者：杨亮亮[1] 刘成林[1] 沈法华[1] 赵勇兵 Yang Liangliang;Liu Chenglin;Shen Fahua;Zhao Yongbing(School of Physics and Electronic Engineering,Yancheng Teachers University,Yancheng,Jiangsu 224007,China)

机构地区：[1]盐城师范学院物理与电子工程学院,江苏盐城224007

出　　处：《光学学报》2021年第12期43-52,共10页Acta Optica Sinica

基　　金：国家自然科学基金(61904158);江苏省自然科学基金面上项目(BK20201475);江苏省高校自然科学研究项目(19KJD140005)。

摘　　要：对于工作在成像光学系统中的衍射光学元件,一定的入射角度范围是其工作的常态,并且增透膜的引入会影响衍射光学元件的带宽积分平均衍射效率。本文基于衍射光学元件的相位函数,修正了含有增透膜时的微结构高度;建立了在一定入射角度范围内工作时,单层和多层衍射光学元件的复合带宽积分平均衍射效率与修正微结构高度之间关系的理论模型;并以工作在红外波段的衍射光学元件为例,对比分析了含有增透膜时采用带宽积分平均衍射效率最大化得到微结构高度的常用方法和利用修正微结构高度的修正方法设计得到的衍射效率和带宽积分平均衍射效率。仿真和计算结果表明:入射角度和增透膜厚度的改变都会引起含有增透膜的衍射光学元件的带宽积分平均衍射效率下降;基于修正的设计方法,计算得到了以ZnSe为基底的单层衍射光学元件(入射角度范围为0°~30°)和多层衍射光学元件(入射角度范围为0°~20°)的复合带宽积分平均衍射效率分别达到95.528%和99.449%。该方法为衍射光学元件的优化设计提供了参考。For the diffractive optical elements(DOEs)in imaging optical systems,a range of incident angles is the normal working situation,and the introduction of antireflection coatings(ARCs)to DOEs affects polychromatic integral diffraction efficiency(PIDE).Relying on the phase function of DOEs,we modify the microstructure heights with ARCs in this paper.Furthermore,we build theoretical models of the relationship between the comprehensive PIDE and modified microstructure heights of single-layer and multilayer DOEs working within a certain incident angle range.With DOEs working in the infrared waveband as an example,we comparatively analyze the diffraction efficiency and PIDE with ARCs designed by the common method(CM)of maximizing the PIDE to obtain microstructure heights and by the proposed modified method(MM)based on modified microstructure heights.The simulation and calculation results show that both the change in incident angles and optical thicknesses of ARCs will induce the decline in the PIDE of DOEs with ARCs.With the MM,the comprehensive PIDE is 95.528%and 99.449%,respectively for single layer DOEs with a substrate of ZnSe working in the incident angle range of 0°--30°and multilayer DOEs in the 0°--20°range.This method provides a reference for the optimal design of DOEs.

关 键 词：衍射 光学元件 增透膜 入射角度 衍射效率 微结构高度 

分 类 号：O439[机械工程—光学工程]