基于MEMS工艺W频段高效功率合成器的设计  

Design of high efficient W-band spatial power combiner utilizing silicon micromachining

作　　者：于士同 邢小明[1] 夏侯海[1] Yu Shitong;Xing Xiaoming;Xia Houhai(Nanjing Research Institute of Electronics Technology,Nanjing 210039,China)

机构地区：[1]南京电子技术研究所,南京210039

出　　处：《电子测量技术》2021年第9期31-35,共5页Electronic Measurement Technology

摘　　要：传统W波段功率合成器因为尺寸大很难与其他平面电路集成,限制了其在小尺寸平台上的应用。为了解决这个问题,开展高效率、小型化功率合成器的研究。提出了一种新型2路波导空间功率合成器结构,基于硅材料,使用MEMS工艺和晶圆键合三维堆叠技术,在硅基上开展多路功率合成,实现W频段高效率、小型化的功率合成。极大提升加工精度,使得整体性能更好、尺寸更小、更易于集成。仿真结果显示,整体结构在90~96 GHz频率范围内,回波损耗低于-22.5 dB,插入损耗优于-0.22 dB,整体功率合成效率优于95%。The traditional W-band power combiner is difficult to integrate with other planar circuits because of its large size,which limits its application in small platform.To carry out research on high efficiency and small size power combiner.Present a novel two-way waveguide power combining structure which uses multiplayer silicon bulk micromachining techniques.A good performance is achieved by utilizing MEMS and three-dimensional wafer bonding stacking technology.Within the operating band from 90~96 GHz,the return loss is lower than-22.5dB,the insertion loss is better than-0.22dB and the simulated result demonstrates an overall combining efficiency of 95%.

关 键 词：MEMS工艺 空间功率合成 硅基波导 插入损耗 回波损耗 

分 类 号：TN626[电子电信—电路与系统]