Atomic Force Microscopy of Surface Reconstructed SrTiO3 Vicinal Substrates for Epitaxial Growth of YBa_(2)Cu_(3)O_(7-δ) Thin Films  

作　　者：HU Wen-fei LI Lin WANG Tian-sheng LIU Wei TAO Hong-jie TIAN Yong-jun CHEN Ying-fei 胡文斐;李林;王天生;刘维;陶宏;田永君;陈莺飞(National Laboratory for Superconductivity,Chinese Academy of Sciences,Beijing 100080;Institute of Physics,Chinese Academy of Sciences,Beijing 100080;Department of Material Science,Yanshan University,Qinhuangdao 066004)

机构地区：[1]National Laboratory for Superconductivity,Chinese Academy of Sciences,Beijing 100080 [2]Institute of Physics,Chinese Academy of Sciences,Beijing 100080 [3]Department of Material Science,Yanshan University,Qinhuangdao 066004

出　　处：《Chinese Physics Letters》1999年第11期853-855,共3页中国物理快报（英文版）

摘　　要：SrTiO_(3)(001) vicinal substrates of miscut 1°, 3°, and 6° toward the (001) plane were annealed at 800-1000°C in pure flowing O_(2) for 6h and examined by atomic force microscopy. The high temperature annealed vicinal SiTiO_(3)(001) displayed arrays of straight steps and smooth terraces. The step heights vary from about 2 to 6 unit cell depending on the annealing temperatures. At 1000°C, step bunching becomes obvious. The height steps of 1 unit cell are difficult to be observed by our atomic force microscopy. The YBa2Cu3O7-δ thin film grows epitaxially on the step-terrace surface with c-axis orientation by magnetron sputtering in the two-dimensional island mode. Prospect of step-flow growth is being discussed.

关 键 词：STEPS STRAIGHT ISLAND 

分 类 号：G63[文化科学—教育学]