谐振式压力传感器自激驱动及非线性特性研究  

Research on self excitation drive and nonlinear characteristics of resonant pressure sensor

作　　者：周孝 刘兴宇 丁徐锴 李宏生[1,2] ZHOU Xiao;LIU Xingyu;DING Xukai;LI Hongsheng(School of Instrument Science and Engineering,Southeast University,Nanjing 210096,China;Key Laboratory of Micro-Inertial Instrument and Advanced Navigation Technology of Ministry of Education,Southeast University,Nanjing 210096,China;The 49th Research Institute of China Electronics Technology Group Corporation,Harbin 150028,China)

机构地区：[1]东南大学仪器科学与工程学院,江苏南京210096 [2]东南大学微惯性仪表与先进导航技术教育部重点实验室,江苏南京210096 [3]中国电子科技集团公司第四十九研究所,黑龙江哈尔滨150028

出　　处：《传感器与微系统》2021年第8期20-23,27,共5页Transducer and Microsystem Technologies

摘　　要：为了探究非线性刚度对谐振式压力传感器及其测控系统的影响,建立了基于非线性谐振器的直流AGC闭环自激模型,采用平均法进行模型的求解。在SIMULINK中搭建闭环自激系统的仿真模型,以验证平均法的求解结果以及研究非线性刚度对系统性能的影响。采用开环扫频及线性拟合的方法测得了实际压力传感器的固有频率以及非线性系数。仿真结果表明:基于平均法的闭环自激模型求解结果与仿真结果非常接近。非线性刚度对闭环自激系统的频率稳定性影响非常微弱,但却会使系统的动态性能变差,从而增加闭环控制的难度。过大的非线性系数会降低传感器的灵敏度并增加传感器的非线性度,因此在传感器芯片设计时要尽可能降低非线性刚度的大小。In order to explore the influence of nonlinear stiffness on resonant pressure sensor and its measurement and control system,a DC AGC closed-loop self excitation model based on nonlinear resonator is established,and the average method is used to solve the model.The simulation model of the closed-loop self-excited system is built in SIMULINK to verify the solution result of the average method and to study the influence of the nonlinear stiffness on the system performance.The natural frequency and nonlinear coefficient of the actual pressure sensor are measured by the method of open-loop sweep and linear fitting.The simulation results show that the solution results of the closed-loop self-excited model based on the average method are closed to the simulation results.The nonlinear stiffness has a very weak impact on the frequency stability of the closed-loop self-excited system,but it will make the dynamic performance of the system worse,thus increasing the difficulty of the closed-loop control.Too large nonlinear coefficient will reduce the sensitivity of the sensor and increase the nonlinearity of the sensor.In the design of sensor chip,the nonlinear stiffness should be reduced as much as possible.

关 键 词：谐振式压力传感器 闭环自激 平均法 非线性刚度 

分 类 号：TP212[自动化与计算机技术—检测技术与自动化装置]