基于纳米晶材料的高频大范围偏转器研究  

Research on high frequency and wide range deflectors based on nanocrystalline materials

作　　者：孟彦亭 王鹏飞 刘俊标[1,2] 殷伯华 李文萍[3] 韩立 MENG Yan-ting;WANG Peng-fei;LIU Jun-biao;YIN Bo-hua;LI Wen-ping;HAN Li(Institute of Electrical Engineering,Chinese Academy of Sciences,Beijing 100190;University of Chinese Academy of Sciences,Beijing 100049;Beihang University,Beijing 100083,China)

机构地区：[1]中国科学院电工研究所,北京100190 [2]中国科学院大学,北京100049 [3]北京航空航天大学,北京100083

出　　处：《电子显微学报》2021年第4期452-459,共8页Journal of Chinese Electron Microscopy Society

基　　金：国家重点研发计划(No.2018YFB1105202);先进封装X射线3D检测技术创新交叉团队项目(No.JCTD-2019-02);高精度大扫描场电子束复合聚焦偏转系统研制项目(No.2020B0101320002).

摘　　要：在电子束焊接、电子束增材制造等多种应用技术中,偏转器的性能直接影响着电子束的加工效率和质量,其中包括偏转器的偏转范围和高频性能。偏转场分布的均匀性、场强大小和响应速度是影响偏转器性能的关键,而磁偏转器的结构和材料是决定偏转场分布均匀性、场强大小和响应速度的主要因素。本文首先利用磁标位法对多极偏转器的场分布进行了理论分析,表明四极、八极和十二极偏转器中十二极结构更适用于电子束大范围的偏转;之后,利用COMSOL Multiphysics软件对不同磁极材料下的偏转器分别进行了稳态和高频性能的仿真研究;最后,对以纯铁和纳米晶两种磁极材料的偏转器进行了磁场和电感性能的测试;数值计算和实验结果表明:在稳态条件下,纳米晶作为磁极材料的可以同时满足大偏转范围下的高场强值和场均匀性的要求;在高频条件下,纳米晶作为磁极材料的场强值略低于铁氧体,但电感值比后者小约70%,高频性能前者明显优于后者。因此,选用纳米晶作为磁极材料的十二极偏转器,偏转场强大且高频性能好,能够实现电子束的高频大范围扫描加工。In various application technologies such as electron beam welding and electron beam additive manufacturing,the deflection range and high frequency performance of the magnetic deflector directly affect the efficiency and quality of electron beam processing.The structure and material of the magnetic deflector are the key factors that determine the uniformity of the deflection field,the strength of the field and the response speed.This paper firstly uses the magnetic scalar potential method to analyze the field distribution of the multi-pole deflector,which shows that the twelve-pole structure of the quadrupole,octupole and twelve-pole deflector is more suitable for large-scale deflection of the electron beam;The COMSOL Multiphysics software has carried out simulation research on the steady-state and high-frequency performance of the deflectors under different magnetic pole materials.Finally,the magnetic field and inductance performance of the developed pure iron and nanocrystalline deflectors are tested;Numerical calculations and experimental results show that under steady-state conditions,nanocrystals as magnetic pole materials can simultaneously meet the requirements of high field strength and field uniformity under a large deflection range;under high frequency conditions,nanocrystals can be used as the field of magnetic pole materials.The strength is slightly lower than ferrite,but the inductance is about 70%smaller than the latter,and the high-frequency performance of the former is significantly better than the latter.Therefore,the twelve-pole deflector using nanocrystalline as the magnetic pole material has a strong deflection field and good high-frequency performance,which can realize the high-frequency and wide-range scanning processing of the electron beam.

关 键 词：电子束增材制造 磁偏转器 纳米晶 磁场分布 电感值 

分 类 号：TN14[电子电信—物理电子学] TN16