采用飞秒激光制备REBCO超导带材微桥结构的研究  

Fabrication and characterization of superconductivity of micro-bridge in REBCO tape made by femtosecond laser

作　　者：权雪玲 黄胜利 武悦 沈赟靓 凌天宇[1,2] Quan Xueling;Huang Shengli;Wu Yue;Shen Yunliang;Ling Tianyu(School of Electronic Information and Electrical Engineering,Shanghai Jiao Tong University,Shanghai 200240,China;Center for Advanced Electronic Materials and Devices,Shanghai Jiao Tong University,Shanghai 200240,China)

机构地区：[1]上海交通大学电子信息与电气工程学院,上海200240 [2]上海交通大学先进电子材料与器件平台,上海200240

出　　处：《低温与超导》2021年第7期33-37,共5页Cryogenics and Superconductivity

基　　金：上海研发公共服务平台建设项目(18DZ2295400)资助。

摘　　要：采用飞秒激光器制备了基于第二代高温超导带材(REBCO)的微桥结构。激光共聚焦显微镜以及扫描电镜进行表征,结果表明微桥刻蚀区超导层被完全刻蚀,可以有效约束电流的通路。此外,开展了液氮温区自场条件下临界电流测试,临界电流成比例缩小,n值稍有减少。研究结果表明,采用飞秒激光器制备高质量高鲁棒性的微桥,可以极大的提高效率,为后续进一步在极端条件下测试具有较高载流能力的高温超导带材样品奠定基础。In this work, femtosecond laser was used to fabricate micro-bridge structure based on the second generation high temperature superconducting(REBCO) tape. Results of laser confocal microscopy and scanning electron microscopy show that the superconducting layer in the etching region is completely etched, which enables to effectively restrict the current flow. In addition, the self-field critical currents at liquid nitrogen temperature was measured. The critical current decreases in scale with the dimensions and the n value decreases slightly. These results demonstrate that the high-quality and robust micro-bridge fabricated by femtosecond laser can greatly improve the efficiency, which lay a foundation for further testing high temperature superconducting tape samples with high current carrying capacity under extremes.

关 键 词：第二代高温超导(REBCO)带材 临界电流 飞秒激光 微桥 四引线传输电流测量 

分 类 号：TM26[一般工业技术—材料科学与工程]