溶胶-凝胶法制备AZO薄膜的研究进展  

Study Progress of AZO Films by Sol-gel Methods

作　　者：纪建超 颜悦 哈恩华 JI Jian-chao;YAN Yue;HA En-hua(Beijing Institute of Aeronautical Materials,Beijing 100095,China)

机构地区：[1]北京航空材料研究院,北京100095

出　　处：《真空》2021年第4期30-35,共6页Vacuum

基　　金：国家自然科学基金资助项目(57802297)。

摘　　要：综述了采用溶胶-凝胶法制备AZO薄膜的进展,阐述了影响AZO薄膜光电特性的主要工艺参数,分析了陈化时间、热处理工艺、铝掺杂量、催化剂种类及薄膜厚度因素等对AZO薄膜结构、光电性能的影响,指出了溶胶-凝胶法制备AZO薄膜的优势与不足,展望了未来的研究方向。The research progress of sol-gel technology used to prepare AZO film are reviewed.The influence of sol-gel parameters such as aging time,heating processing,quantity of dopant aluminum,kinds of activator and thickness of film on the structure and optical electrical properties of AZO film are discussed and summarized.The advantage and insufficiency of sol-gel technology were pointed out and research direction of future were proposed.

关 键 词：AZO薄膜 溶胶-凝胶 光电特性 

分 类 号：TB43[一般工业技术]