二氧化钒薄膜的反常热色性能和热滞回线  

Abnormal Thermochromic Properties and Thermal Hysteresis Loops of Vanadium Dioxide Films

作　　者：张化福 景强 孙艳 Zhang Huafu;Jing Qiang;Sun Yan(School of Physics and Optoelectronic Engineering,Shandong University of Technology Zibo 255049,China)

机构地区：[1]山东理工大学物理与光电工程学院,山东淄博255049

出　　处：《半导体技术》2021年第8期640-644,共5页Semiconductor Technology

基　　金：国家自然科学基金重点项目(61235006)。

摘　　要：利用磁控溅射技术在玻璃衬底上制备了不同厚度的二氧化钒(VO2)薄膜。实验结果表明,所制备的VO2薄膜都具有显著的热色性能。厚度较大的薄膜在低温时具有较高的透过率,而在高温时具有较低的透过率。然而,厚度较小的薄膜在500~860 nm波长内的情况正好相反,即低温透过率比高温时的小。厚度较小的薄膜在500~860 nm波长内具有沿逆时针方向的热滞回线,这恰好与波长大于860 nm的情况相反。利用光学干涉理论对这一反常的热色现象及热滞回线进行了理论解释,为进一步理解VO2薄膜的热色性能及相变性能提供参考。Vanadium dioxide(VO2) films with different thicknesses were prepared on glass substrates by utilizing magnetron sputtering technique.The experimental results illustrate that all the deposited VO2 films show remarkable thermochromic properties.As expected, the thicker films exhibitlarger optical transmittance at low temperature and smaller optical transmittance at high temperature.However, for the thinner films, the case is on the contrary, i.e. the optical transmittance at low temperature is smaller than that at high temperature in the wavelength range of 500-860 nm.The thinner film shows a counterclockwise thermal hysteresis loop in the wavelength range of 500-860 nm which is opposite to that in the wavelength range of greater than 860 nm.The anomalous thermochromic phenomenon and thermal hysteresis loop were explained by the optical interference theory, which provided a refe-rence for further understanding the thermochromic properties and phase transition properties of VO2 films.

关 键 词：二氧化钒(VO2) 磁控溅射 反常热色性能 逆时针热滞回线 薄膜 

分 类 号：O484[理学—固体物理]