栅式电容位移传感阵列信号正交性偏差的智能补偿方法  

Novel Compensation Method for Orthogonality Deviation of an Incremental Capacitive Displacement Sensing Array

作　　者：余建平[1] 卢科青[2] 李欣[1] YU Jianping;LU Keqing;LI Xin(Key Laboratory of Air-Driven Equipment Technology of Zhejiang Province,Quzhou University,Quzhou Zhejiang 324000,China;School of Mechanical Engineering,Hangzhou Dianzi University,Hangzhou Zhejiang 310018,China)

机构地区：[1]衢州学院浙江省空气动力装备技术重点实验室,浙江衢州324000 [2]杭州电子科技大学机械工程学院,浙江杭州310018

出　　处：《传感技术学报》2021年第5期657-662,共6页Chinese Journal of Sensors and Actuators

基　　金：浙江省基础公益研究计划项目(LGG19E050013);浙江省自然科学基金项目(LZY21E050003)。

摘　　要：本文提出一种栅式电容位移传感阵列信号正交性偏差的补偿方法和实现方式。分析传感阵列X-Y方向线性位移信号正交性偏差产生的原因,建立偏航角影响下的信号正交性偏差模型,利用互相关检测原理,构造了栅式电容位移传感阵列信号正交性偏差补偿新方法。实验结果表明,传感阵列正交性偏差跟随偏航角位移θ从为0.2°变化为0.4°,0.8°和2.0°时有显著增大,采用互相关补偿法后保证了X-Y线性位移信号的非线性度维持在0.32%,0.29%,0.24%和0.07%之间,对比直接求解法有大幅的降低,基本消除了正交性偏差对X-Y方向线性位移测量的影响,测量稳定性得到显著改善。A compensation method and whose implementation for orthogonality deviation of an incremental capacitive displacement sensing array are proposed. Specific reason of orthogonality deviation for the linear displacement signals in X-Y direction is analysed firstly, orthogonality deviation model under the influence of yaw angle is established as well, based on which, a novel compensation method for orthogonality deviation is constructed by applying cross-correlation detection. Results from a test bench show that the orthogonality deviation of the sensor array increases significantly when the yaw angle θ varies from 0.2 ° to 0.4 °,0.8 ° and 2.0 °,nevertheless, the nonlinearity of the X-Y linear displacement signal is maintained among 0.32%,0.29%,0.24% and 0.07% by using the cross-correlation compensation method, which is greatly reduced compared with direct solution method. Influences of the orthogonality deviation on X-Y linear displacement are basically eliminated, measurement stability is drastically improved.

关 键 词：电容位移传感器 正交性偏差 偏航角 互相关补偿 

分 类 号：TH711[机械工程—测试计量技术及仪器]