太阳能级多晶硅装置工艺路线比较  

Comparison of Process Routes of Solar-Grade Polysilicon Plant

作　　者：张晓辉 周齐领 Zhang Xiaohui(China Chengda Engineering Co.,Ltd.,Chengdu 610041)

机构地区：[1]中国成达工程有限公司,成都610041

出　　处：《化工设计》2021年第4期3-6,22,I0005,共6页Chemical Engineering Design

摘　　要：改良西门子法和硅烷流化床法是太阳能级多晶硅装置采用的两种工艺技术路线。本文对两者进行了全面的对比,主要包括工艺流程、消耗定额、技术优缺点等方面,并对硅烷法的主要技术难点及技术前景进行了论述,指出了多晶硅生产技术的发展方向。Modified Siemens method and silane fluidized bed method are the two process technological routes adopted by solar-grade polysilicon plants.This paper makes a comprehensive comparison between the two including the process flow,consumption quota,technical advantages and disadvantages etc.,discusses the main technical difficulties and technical prospects of the silane method,and points out the development direction of polysilicon production technology.

关 键 词：多晶硅 西门子法 硅烷法 

分 类 号：TQ127.2[化学工程—无机化工]