氮化硅光子器件与应用研究进展  

Recent advances in silicon nitride-based photonic devices and applications

作　　者：范智斌 陈泽茗 周鑫 何辛涛 江绍基 董建文[1,2] FAN Zhi-bin;CHEN Ze-ming;ZHOU Xin;HE Xin-tao;JIANG Shao-ji;DONG Jian-wen(School of Physics,Sun Yat-sen University,Guangzhou 510275,China;State Key Laboratory of Optoelectronic Materials and Technologies,Sun Yat-sen University,Guangzhou 510275,China)

机构地区：[1]中山大学物理学院,广东广州510275 [2]中山大学光电材料与技术国家重点实验室,广东广州510275

出　　处：《中国光学》2021年第4期998-1018,共21页Chinese Optics

基　　金：国家自然科学基金(No.62035016,No.61805288,No.11904421);广东省基础与应用基础研究基金区域联合基金项目(No.2020A1515110661)。

摘　　要：氮化硅材料提供了一种与CMOS兼容的集成光子平台,具有丰富的光学特性。通过调节相关制备参数,可以获得特定折射率的薄膜材料,且消光系数和非线性系数具有较大可调控范围。因此,氮化硅材料在薄膜光学、微纳平面光学、非线性集成光学等诸多领域具有广泛的应用前景。本文主要介绍氮化硅材料的光学特性及其在光学薄膜、微纳超构材料和硅光集成器件方面的研究现状,综述氮化硅材料在太阳能薄膜、可见光超构表面、光栅耦合器和非线性光波导等应用领域的研究概况。Silicon nitride provides a CMOS-compatible integrated photonic platform with rich optical properties.By adjusting the relevant fabrication parameters,silicon nitride with specific refractive index between 1.9~3.2 can be achieved,and its extinction and nonlinear coefficient can have a large adjustable range.Silicon nitride has wide potential applications in many fields such as thin film optics,micro-nano planar optics and nonlinear integrated photonics.In this paper,we review the optical properties of silicon nitride and its recent advances in optical film,micro-nano metamaterial and silicon photonics,and also review the research progresses on the applications of solar thin films,visible metasurfaces,grating couplers and nonlinear optical waveguides.

关 键 词：氮化硅 超构表面 光学薄膜 光栅耦合器 非线性光波导 

分 类 号：O439[机械工程—光学工程]