PVDF压电薄膜的性能优化研究进展  

Research Progress and Prospects of Performance Optimization of PVDF Piezoelectric Films

作　　者：曹茜茜 魏淑华[1] 姚沛林 张静[1] 王艳蓉 王盛凯[2] CAO Qianqian;WEI Shuhua;YAO Peilin;ZHANG Jing;WANG Yanrong;WANG Shengkai(School of Information Science and Technology, North China University of Technology, Beijing 100144, China;High-Frequency High-Voltage Device and Integrated Circuits R&D Center, Institute of Microelectronics of the Chinese Academy of Sciences, Beijing 100029,China)

机构地区：[1]北方工业大学信息学院,北京100144 [2]中国科学院微电子研究所高频高压中心,北京100029

出　　处：《压电与声光》2021年第4期542-549,共8页Piezoelectrics & Acoustooptics

摘　　要：聚偏氟乙烯(PVDF)压电薄膜是一种压电高分子材料,具有广泛的科学价值和技术应用前景。PVDF薄膜因具有独特的压电效应,且质地软,灵敏度高及频响范围宽等优点,使其在能量收集、新型智能传感器、生物医学、电池隔膜等领域得到了广泛的应用和关注。PVDF晶区中至少有4种晶型,其中β晶型PVDF具有优异的压电性能。该文总结了近年来通过制备工艺、化学掺杂及改性方法的优化来提高β晶型含量,进而提升薄膜性能的方法,系统地介绍了PVDF压电薄膜在部分领域的应用,并对其未来发展做出了展望。The poly vinylidene fluoride(PVDF)piezoelectric film is a kind of piezoelectric polymer material,which has a wide range of scientific value and technical application prospects.Because of its unique piezoelectric effect,soft texture,high sensitivity,and wide frequency response range,the PVDF film has been widely used and concerned in many fields such as energy harvesting,new smart sensors,biomedicine,and battery diaphragms.There are at least 4 crystal types in the PVDF crystal region,among whichβcrystal type PVDF has excellent piezoelectric properties.This article summarizes the methods used in recent years to increase the content ofβcrystal type and improve the performance of the film through the optimization of the preparation process,chemical doping and modification methods.The applications of PVDF piezoelectric thin films in some fields are systematically introduced,and the future development prospects are also presented.

关 键 词：聚偏氟乙烯 压电 Β晶型 制备工艺 化学掺杂 改性 应用 

分 类 号：TN432[电子电信—微电子学与固体电子学] TM22[一般工业技术—材料科学与工程]