基于Nelder–Mead单纯形法的杠杆式触针轮廓仪非线性误差补偿  

Nonlinear error compensation of lever-type stylus profilometer based on Nelder-Mead simplex method

作　　者：孙艳玲 吴运权 李波 常素萍[2] SUN Yanling;WU Yunquan;LI Bo;CHANG Suping(School of Mechanical Engineering,Hubei University of Arts and Science,Xiangyang 441053,China;School of Mechanical Science&Engineering,Huazhong University of Science and Technology,Wuhan 430074,China)

机构地区：[1]湖北文理学院机械工程学院,湖北襄阳441053 [2]华中科技大学机械科学与工程学院,湖北武汉430074

出　　处：《中国测试》2021年第8期114-119,共6页China Measurement & Test

摘　　要：杠杆式触针轮廓仪由于其测量精度高、测量范围广,成为常用的表面轮廓测量仪器。但是杠杆结构在测量过程中带来的非线性误差对轮廓测量精度影响较大,该文对基于激光干涉原理的高精度大量程杠杆式触针轮廓仪进行非线性误差分析,应用Nelder–Mead单纯形法对误差进行补偿,并通过高精度标准球冠进行补偿结果的校验实验。通过实验结果的分析可知,该方法可以有效地减小测量结果的非线性误差,将触针式轮廓仪在大量程测量时的X、Z向精度提高到±1μm以内。Due to the high measurement accuracy and wide range of applications,lever-type stylus profiler is commonly used in surface profile measuring.However,the nonlinear error caused by the lever structure has a great influence on the profile measurement.In this paper the nonlinear errors of stylus profiler are analyzed based on laser interference principle.The nonlinear errors are compensated by the Nelder-Mead simplex,and the compensation results are verified by the high precision standard spherical crown.It can be seen that the method can effectively reduce the nonlinear error of the measurement result and improve the accuracy of the stylus profiler in large-scale measurement to within±1μm of X and Z directions.

关 键 词：杠杆式触针 非线性误差 Nelder–Mead单纯形法 误差补偿 

分 类 号：TH741[机械工程—光学工程] TB9[机械工程—仪器科学与技术]