基于MEMS的柔性薄膜式动态压力测量带研制  

Development of Flexible Thin-film Dynamic Pressure Measuring Tape Based on MEMS

作　　者：卢翔宇[1] 王勇[1] Lu Xiangyu;Wang Yong(Key Laboratory of Aerodynamic Noise Control,China Aerodynamics Research&Development Center,Mianyang 621000,China)

机构地区：[1]中国空气动力研究与发展中心气动噪声控制重点实验室,四川绵阳621000

出　　处：《兵工自动化》2021年第9期44-49,共6页Ordnance Industry Automation

基　　金：国家自然科学基金项目(11802114)。

摘　　要：针对脉动压力测量中测压点布置困难的问题,对柔性薄膜式动态压力测量带进行研制。根据气动测量的需求,将微机电系统(micro-electro-mechanical system,MEMS)微型动态压力传感器封装在柔性印刷电路板(flexible printed circuit,FPC)柔性衬底基片上,采用Protel99SE软件完成印制电路板(printed circuit board,PCB)设计。利用标准翼型在风洞开展研究,通过不同的试验条件,对比柔性薄膜式动态压力测量带和传统嵌入式压力传感器两种方法的测量结果,验证了柔性薄膜式动态压力测量带的性能。In order to solve the problem of pressure measurement point arrangement in pulsating pressure measurement,a flexible thin-film dynamic pressure measuring tape was developed.According to the requirement of aerodynamic performance measurement,micro-electro-mechanical system(MEMS)micro dynamic pressure sensors are packaged on flexible printed circuit(FPC)flexible substrate,and the printed circuit board(PCB)is designed by Protel99SE software.The standard airfoil is used to carry out the research in the wind tunnel.Through different test conditions,the measurement results of the flexible thin-film dynamic pressure measuring tape and the traditional embedded pressure sensor are compared,and the performances of the flexible thin-film dynamic pressure measuring tape are verified.

关 键 词：脉动压力 MEMS 柔性薄膜 压力测量 风洞试验 

分 类 号：V211.74[航空宇航科学与技术—航空宇航推进理论与工程]