基于铁电薄膜材料的反射式移相器设计  

Design of Reflective Phase Shifter Based on Ferroelectric Thin Film Material

作　　者：杨家铭 黄季甫 周国良 YANG Jia-ming;HUANG Ji-fu;ZHOU Gu-liang(School of Information Science and Engineering,Ningbo University,Ningbo 315211,China)

机构地区：[1]宁波大学信息科学与工程学院,宁波315211

出　　处：《无线通信技术》2021年第2期22-26,共5页Wireless Communication Technology

基　　金：国家重点研发计划(2018YFB1802100);国家自然科学基金(61801252,U1809203,61631012);广东省重点领域研发计划(2019B010156004);浙江省省属高校基本科研业务费专项资金资助(SJLY2020001)。

摘　　要：本文提出了一种基于正交耦合器和BST可调电容器的反射式移相器的设计。BST材料的介电常数随偏置电压所提供的不同的静电场而发生变化。因此,通过控制外部电压,可以连续地获得有效的变化介电常数和移相器的反射相位。利用PLD技术实现了0.3μm厚的BST薄膜,并采用微加工和氧化铝衬底组成的可调谐电容来测试其微波性能。通过将耦合器和采用钛酸锶钡薄膜可调电容器构成的反射负载相结合,在微带线上设计了DC偏置电路,用于施加直流电压。在0V至60V电压范围内,通过测试和分析,获得BST薄膜的介电常数调谐范围为310-455。通过ADS和HFSS的仿真模拟,在提供不同的偏置电压BIAS可在25GHz-45GHz频率范围内实现了90°相移和2.9dB插入损耗,S参数仿真结果表明,所设计的移相器具有令人满意的传输特性。This paper presents a design of reflective phase shifter based on quadrature coupler and BST adjustable capacitor.The dielectric constant of the BST material changes with the different electrostatic fields provided by the bias voltage.Therefore,by controlling the external voltage,the effective varying dielectric constant and the reflected phase of the phase shifter can be continuously obtained.A 0.3μm thick BST film was realized using PLD technology,and a tunable capacitor composed of micromachining and alumina substrate was used to test its microwave performance.By combining the coupler and the reflective load composed of strontium barium titanate film adjustable capacitors,DC bias circuit is designed on the microstrip line to apply DC voltage.In the voltage range of 0 V to 60 V,through testing and analysis,the tuning range of the dielectric constant of the BST film is 310-455.Through the simulation of ADS and HFSS,BIAS can achieve 90°phase shift and 2.9 dB insertion loss in the frequency range of 25 GHz-45 GHz by providing different bias voltages.The S-parameter simulation results show that the designed phase shifter has Satisfactory transmission characteristics.

关 键 词：反射式移相器 可调谐电容 铁电薄膜 钛酸锶钡 

分 类 号：TN82[电子电信—信息与通信工程]