碳化硅光栅结构中的强吸收及热辐射调控  

Enhanced absorption and manipulation of thermal radiation in silicon carbide gratings

作　　者：鲍森 王宗缇 郑改革[3] BAO Sen;WANG Zongti;ZHENG Gaige(Department of Electronics Engineering, Nanjing Xiaozhuang University, Nanjing, 210017;School of Information Science and Technology, Shanghai Tech University, Shanghai, 201210;Jiangsu Collaborative Innovation Center on Atmospheric Environment and Equipment Technology, Nanjing University of Information Science & Technology, Nanjing 210044)

机构地区：[1]南京晓庄学院电子工程学院,南京210017 [2]上海科技大学信息科学与技术学院,上海201210 [3]南京信息工程大学江苏省大气与环境装备协同创新中心,南京210044

出　　处：《光散射学报》2021年第1期79-83,共5页The Journal of Light Scattering

基　　金：江苏省自然科学基金(BK20191396)。

摘　　要：基于严格耦合波分析(RCWA)方法研究了红外光波与碳化硅(SiC)光栅结构间的相互作用,尤其是结构在10微米到14微米波段的吸收及热辐射特性。计算得到了光栅的吸收/发射谱,验证了表面声子共振的激发,分析了光栅周期、光栅深度、占空比和入射角度对吸收特性的影响。在横磁(TM)波入射下,光栅周期及深度的增加均导致吸收峰/发射峰的红移;占空比对辐射性能也会产生较大的影响,改变占空比,在光栅全反带出现了吸收峰,还影响着吸收峰位置及幅值;入射角度变大时,吸收谱/发射谱峰值呈现减小势态。本文的研究结果可以拓展到其它极化晶体材料中。The absorption and thermal radiation characteristics of the silicon carbide gratings within the wavelength range from 10 m to 14 m are studied and analyzed by the rigorous coupled wave analysis(RCWA)method.Influences of different physical parameters(period,depth,filling factor and incident angle)on the spectral properties are discussed in detail.The conclusions are as follows:Under TM-polarization,the period,grating depth,grating width and incidence have a significant effect on the absorption/emission spectral.With the increasing of the period and the grating depth,the absorption peak/emission peak will redshift and the peak will decrease.While the filling factor(f)decreases,the absorption peak appears within the Restrahlen band,and the smaller the f is,the larger the absorption peak is.When the incident angle is increased,the peak value of absorption/emission spectrum decreases.The conclusions of this study can also be extended to other polar crystal materials.

关 键 词：碳化硅 表面声子共振 光栅 

分 类 号：O436.2[机械工程—光学工程]