一种新型的超纯水系统总有机碳含量检测装置的研制  

Development of a new measuring device for total organic carbon content in ultrapure water system

作　　者：王思华 秦浩华[1] 郭蓝天[1,2] Wang Sihua;Qin Haohua;Guo Lantian(School of Automation and Electronic Engineering,Qingdao University of Science and Technology,Qingdao 261000,China;School of Computer Science,Northwestern Polytechnical University,Xi'an 610100,China)

机构地区：[1]青岛科技大学自动化与电子工程学院,青岛261000 [2]西北工业大学计算机学院,西安610100

出　　处：《电子测量技术》2021年第12期168-172,共5页Electronic Measurement Technology

基　　金：陕西省自然科学基金(2020JQ-214);国家自然科学基金(62004176)项目资助。

摘　　要：水中总有机碳含量(TOC)是实验用超纯水的一项重要指标,其测量是否准确,关系到相关实验结果的准确性。针对现有基于紫外氧化法的TOC检测设备中氧化池体积偏大,导致超纯水氧化效率低、时间长,且大多结合NDIR传感器进行二氧化碳含量检测,复杂工艺的引入,导致设备工作过程复杂,降低了测量精度和检测效率等问题,设计一款高效高精度的超纯水TOC检测设备,采用紫外氧化法与电导率法相结合的方式,从氧化池结构入手,设计一款超小体积、结构精密的一体式电导氧化池,通过一系列对比实验得到氧化池的最优体积,兼顾反应速率与精度。基于高性能、低功耗的嵌入式微控制器对设备进行了电控系统的硬件设计和配套软件开发,通过一系列实验证明了本设计在提高检测速率的同时,兼具较高的测量精度同与生产成本,使得该设备具有完全无污染、低耗能、高效高精度、低成本等特点。Total organic carbon content(TOC) in water is an important index for the classification of ultrapure water grades in experiments. Whether the measurement is accurate or not is related to the accuracy of the relevant experimental results. This paper designs a high-efficiency and high-precision ultra-pure water TOC detection equipment in view of the large volume of the oxidation tank in the existing TOC detection equipment based on ultraviolet oxidation method, which leads to the low oxidation efficiency of ultra-pure water, and most of them combine with NDIR sensors to detect carbon dioxide content and the introduction of complex process, which leads to the complex working process of the equipment and reduces the measurement accuracy and detection efficiency. The ultraviolet oxidation method and the resistance method are combined, and an ultra-small volume and precise integrated oxidation-conductance tank is designed based on the structure of the oxidation tank. Based on high performance and low power embedded micro-controller, the hardware design and software development of electronic control system are carried out. Through a series of experiments, it is proved that the design has the characteristics of no pollution, low energy consumption, high efficiency, high precision and low cost while improving the detection rate.

关 键 词：紫外氧化法 超纯水 总有机碳含量 嵌入式微控器 

分 类 号：TH832[机械工程—仪器科学与技术]