超短脉冲激光切割设备中mark点形状选择对振镜标定精度的影响研究  

Study on the Influence of Mark Point Shape Selection on Galvanometer Calibration Accuracyin Ultrashort Pulse Laser Cutting Equipment

作　　者：黄羲凌 刘昆 王丽 汪于涛 张磊 骆公序[1] Huang Xiling;Liu Kun;Wang Li;Wang Yutao;Zhang Lei;Luo Gongxu(Shanghai Institute of Laser Technology,Shanghai Keylab of Laser Beam Micro Processing,Shanghai 200233,China)

机构地区：[1]上海市激光技术研究所,上海市激光束精细加工重点实验室,上海200233

出　　处：《应用激光》2021年第3期583-589,共7页Applied Laser

基　　金：上海市科委项目(19511130400)。

摘　　要：采用振镜进行加工的激光切割设备,为了提高切割精度,首先需要对振镜进行标定,通行的标定方法是使用振镜在金属片或其他刚性材料上切割出一组具有固定图案(通常被称作mark点)的阵列,然后用相机逐一读取该阵列中每个图案的具体位置,据此计算校正网格并实施校正。圆形和十字形是两种最常使用的mark点形状。对这两种mark点对振镜标定精度的影响进行了对比试验,结果表明,圆形mark点标定的精度更好。在平台重复定位标准差约为1μm的情况下,圆形mark点标定后的振镜平均误差为1.99μm,标准差为1.09μm;十字形mark点标定后的振镜平均误差为2.95μm,标准差为1.60μm。For laser cutting equipment that uses galvanometers for processing, in order to improve cutting accuracy, the galvanometer must be calibrated. The common calibration method is using galvanometers to cut a matrix of fixed patterns(usually called mark point), and then use the camera to read the specific position of each pattern in the matrix one by one, and calculate the correction grid based on this and implement the correction. Circle and cross are two commonly used mark point shapes. In this paper, a comparative experiment was carried out on the influence of the two kinds of mark points on the calibration accuracy of the galvanometer. The results show that the accuracy of the circular mark point calibration is better. When the standard deviation of the repeated positioning of the platform is about 1 μm, the average error of the galvanometer after the circular mark point calibration is 1.99 μm, and the standard deviation is 1.09 μm;the average error of the galvanometer after the cross mark point calibration is 2.95 μm, the standard deviation is 1.60μm.

关 键 词：振镜 mark点形状 误差 精度 

分 类 号：TN249[电子电信—物理电子学]