基于发射光谱的微波等离子化学气相沉积中的电子温度诊断  

Electron Temperature Diagnostics in Microwave Plasma Chemical Vapor Deposition by Optical Emission Spectroscopy

作　　者：陈驰[1] 张朝阳[1] 傅文杰[1] 鲁钝 黄同兴 鄢扬[1] CHEN Chi;ZHANG Chaoyang;FU Wenjie;LU Dun;HUANG Tongxing;YAN Yang(School of Electronic Science and Engineering and Terahertz Science,University of Electronic Science and Technology of China,Chengdu 610054,China)

机构地区：[1]电子科技大学电子科学与工程学院,成都610054

出　　处：《光子学报》2021年第9期159-167,共9页Acta Photonica Sinica

基　　金：国家重点研发计划(No.2019YFA0210202);国家自然科学基金(No.61971097);四川科学技术计划(No.2018HH0136);四川省太赫兹科学技术重点实验室基金(No.THZSC201801)。

摘　　要：在气压40~80 Pa和微波功率400~800 W条件下,使用光学发射光谱法(OES)对Ar、CH4等气体产生的等离子体进行电子温度诊断。实验结果表明,OES法测试得到的电子温度介于0.75 eV到4 eV之间。在含碳气体的微波同轴线型等离子体中使用OES方法进行诊断是可行的,这些研究结果可以进一步拓展OES方法在等离子体增强化学气相沉积领域中的应用。The electron temperature of the Ar/CH4 plasma was diagnosed under the pressure of 40~80 Pa and the microwave power of 400~800 W by Optical Emission Spectrometry(OES).The experimental results show that the electron temperature obtained by the OES is between 0.75 eV and 4 eV under the above experimental conditions.Through measurement of Ar or CH4 plasma,it is feasible to use the OES method in microwave coaxial plasma with carbon-containing gas.This research can further expand the application of the OES method in the PECVD field.

关 键 词：电子温度诊断 微波等离子体 朗缪尔探针 发射光谱 

分 类 号：TL65[核科学技术—核技术及应用]