精密减速器角位移测量系统设计  

Design of angular displacement measuring system for precision reducer

作　　者：路遥环 裘祖荣[1] 尤悦 薛洁 Lu Yaohuan;Qiu Zurong;You Yue;Xue Jie(School of Precision Instruments and Opto-electronics Engineering,Tianjin University,Tianjin 300072,China)

机构地区：[1]天津大学精密仪器与光电子工程学院,天津300072

出　　处：《仪器仪表学报》2021年第7期14-20,共7页Chinese Journal of Scientific Instrument

基　　金：国家重点研发计划重大科学仪器专项(2017YFF0108102)资助。

摘　　要：为了实现对精密减速器输入端和输出端角位移的精密测量,建立精密减速器角位移测量系统。对该系统的机械结构、角度测量及标定方法、基于非线性最小二乘法的误差补偿模型进行研究。通过"立式筒状"结构和圆光栅角度传感器"前置"避免了传统检测仪的弱刚度结构和轴系形变对角度测量造成的影响。使用光电自准直仪与24面棱体结合的方式离散标定圆光栅角度传感器的角位移测量误差,研究基于谐波分析的误差补偿方法,对角坐标进行补偿,进一步消除误差。实验结果显示,通过优化检测仪的结构设计,角位移测量精度达到±7″;误差补偿后,角位移最终测量精度达到±2″,满足减速器角位移测量的高精度要求,对类似测角系统也有参考价值。To realize precise measurement of input side and output side angular displacement of reducer,the angular displacement measurement system of precision reducer is established.The mechanical structure of the system,angle measurement method,calibration method and error compensation model based on nonlinear least square method are studied.Through the"vertical cylinder"structure and the principle that the circular grating angle sensor is installed as close as possible to the reducer,the influence of the poor structural stiffness and shaft deformation of the traditional tester on the angle measurement could be avoided.The angular displacement measurement error of circular grating angle sensor is discretely calibrated by the combination of a photoelectric autocollimator and a regular polyhedron with 24 facets.The error compensation method based on harmonic analysis is studied,and the angular coordinates are compensated to further eliminate the error.Experimental results show that the measurement accuracy of angular displacement reaches±7″by optimizing the structure design.After error compensation,the final measurement accuracy of the angular displacement reaches±2″,which meets the high precision requirements of the angular displacement measurement of the reducer.It also provides a reference for other angle measurement systems.

关 键 词：角位移测量 结构设计 圆光栅 测量误差 补偿模型 

分 类 号：TH7[机械工程—仪器科学与技术]