基于PVDF三维力传感器设计  

Design of three-dimensional force sensor based on PVDF

作　　者：张艳芳[1] 刘玉荣[1,2] 许章铖 Zhang Yanfang;Liu Yurong;Xu Zhangcheng(School of Micro-electronics,South China University of Technology,Guangdong 510640,China;Guangdong Artificial Intelligence and Digital Economy Laboratory,Guangdong 510335,China)

机构地区：[1]华南理工大学微电子学院,广州510640 [2]广东省人工智能与数字经济实验室,广州510335

出　　处：《仪器仪表学报》2021年第7期66-72,共7页Chinese Journal of Scientific Instrument

基　　金：国家自然科学基金(61871195);广东省基础与应用基础研究基金(2021A1515011872)项目资助。

摘　　要：在现代机器人技术和柔性电子应用中,迫切需要具有高灵敏度、良好灵活性和三维力测量能力的柔性触觉传感器。本文提出了一种基于聚偏氟乙烯(PVDF)压电薄膜的触觉传感器,实现动态三维力测量。传感器由3个夹角为120°的PVDF压电敏感单元构成3个压力敏感区,3个压电敏感单元安置在聚二甲基硅氧烷(PDMS)半球型结构的底面。从PDMS半球顶部传递的三轴接触力引起3个压电敏感单元的电荷分量发生变化,从而计算出接触力的方向和大小。本文推导了基于3个压电敏感单元触觉传感器的三维力算法,对所制备的传感器进行了标定,实现了三维动态力的测试。结果表明,角θ的平均误差为7.75%,角θ的平均误差为12.17%,力F的平均误差为7.48%。该三维力触觉传感器在穿戴式电子产品、健康医疗、人机交互等领域拥有很好的应用潜力。In modern robotics and flexible electronic applications,there is an urgent need for flexible tactile sensors with high sensitivity,good flexibility and three-dimensional force measurement.A tactile sensor based on polyvinylidene fluoride(PVDF)piezoelectric film is proposed to achieve dynamic three-dimensional force measurement.The sensor consists of three PVDF piezoelectric sensitive units with an angle of 120 degrees to form three pressure sensitive areas,and the three piezoelectric sensitive units are arranged on the bottom surface of the polydimethylsiloxane(PDMS)hemispherical structure.The triaxial contact force transmitted from the top of the PDMS hemisphere causes the change of piezoelectric charge in the three piezoelectric sensitive units,thereby calculating the direction and magnitude of the contact force.This paper derives a three-dimensional force algorithm of the tactile sensor with three sensitive units,and gives a calibration for the prepared sensor to realize the three-dimensional dynamic force test.Results show that the average error of angle θ is 7.75%,the average error of angle φ is 12.17% and the average error of force F is 7.48%.The three-dimensional force tactile sensor has good application potential in wearable electronics,health care,and human-computer interaction and other fields.

关 键 词：压电传感器 三维力检测 聚偏氟乙烯薄膜 触觉传感器 

分 类 号：TH89[机械工程—仪器科学与技术]