可调微纳滤波结构的研究进展  

Progress of tunable micro-nano filtering structures

作　　者：余晓畅 许雅晴 蔡佳辰 袁梦琦 高博[4] 虞益挺 YU Xiao-chang;XU Ya-qing;CAI Jia-chen;YUAN Meng-qi;GAO Bo;YU Yi-ting(Research&Development Institute of Northwestern Polytechnical University in Shenzhen,Shenzhen 518057;School of Mechanical and Electronical Engineering,Key Laboratory of Micro/Nano Systems for Aerospace,(Ministry of Education),Key Laboratory of Micro-and Nano-Electro-Mechanical Systems of Shaanxi Province,Northwestern Polytechnical University,Xi’an 710072,China;Honors College,Northwestern Polytechnical University,Xi’an 710072,China;CAS Key Laboratory of Spectral Imaging Technology,Xi’an 710119,China)

机构地区：[1]西北工业大学深圳研究院,广东深圳518057 [2]西北工业大学机电学院,空天微纳系统(教育部)重点实验室,陕西省微纳机电系统重点实验室,陕西西安710072 [3]西北工业大学教育实验学院,陕西西安710072 [4]中国科学院光谱成像技术重点实验室,陕西西安710119

出　　处：《中国光学》2021年第5期1069-1088,共20页Chinese Optics

基　　金：深圳市学科布局项目(No.JCYJ20180508151936092);国家自然科学基金项目(No.51975483);陕西省重点研发计划项目(No.2020ZDLGY01-03);宁波市自然基金重点项目(No.202003N4033);西北工业大学高峰体验计划(No.201912);中国科学院光谱成像重点实验室开放基金项目(No.LSIT201912W)。

摘　　要：传统的光谱成像系统体积较大、工作模式固定,难以满足日益复杂的应用需要。可调微纳滤波结构赋予了微型光谱成像系统轻量、灵活的独特优势,有望实现自适应、智能化的技术目标。本文综述了近些年来国内外已有的可调滤波方法和工作原理;论述了采用液晶及其他相变材料、诱导化学反应等静态式的可调方法,珐珀腔、微纳可调光栅等动态式的滤波结构以及机械拉伸、静电驱动、光驱动等实现手段;介绍了基于微流控芯片、石墨烯实现可调滤波的前沿工作;探讨了可调微纳滤波芯片面临的难题、挑战和未来的发展趋势。Because of the large size and immobility working modes,traditional spectral imaging systems struggle to meet increasingly complex practical needs.Tunable micro-nano filtering structures show unique advantages for their lighter weight and greater flexibility,so they are promising candidates for achieving adaptive and intelligent operation in the future.This article summarizes a variety of tunable filtering methodologies and their operational principles both in domestic and foreign research within the last several years.It illustrates static tunable methods such as utilizing liquid crystal and phase-change materials,some dynamic tunable filtering structures such as Fabry-Pérot cavity,micro-nano tunable grating as well as some driving approaches like mechanical stretching,electrostatic driving,optical driving,etc.Meanwhile,this article also introduces some frontier researches based on microfluidic chips and graphene.In the end,it discusses the barriers,challenges and future trends of development for tunable micro-nano filtering structures.

关 键 词：可调滤波 液晶 相变材料 微纳滤波结构 

分 类 号：O436.1[机械工程—光学工程] O436.2[理学—光学]