椭球形共振光声池设计及性能评估  

Design and performance evaluation of ellipsoidal resonant photoacoustic cell

作　　者：张楚 潘浩 尹翔宇 王巧云[1,2] ZHANG Chu;PAN Hao;YIN Xiangyu;WANG Qiaoyun(College of Information Science and Engineering,Northeastern University,Shenyang 110819,China;Hebei Key Laboratory of Micro-Nano Precision Optical Sensing and Measurement Technology,Qinhuangdao 066400,China)

机构地区：[1]东北大学信息科学与工程学院,辽宁沈阳110819 [2]微纳精密光学传感与检测技术河北省重点实验室,河北秦皇岛066400

出　　处：《量子电子学报》2021年第5期641-647,共7页Chinese Journal of Quantum Electronics

基　　金：国家自然科学基金青年项目,11404054,61601104;河北省自然科学基金,F2019501025,F2020501040,F2017501052;中央高校基本科研业务费,N172304032,2020GFYD026。

摘　　要：提出一种新型椭球形共振光声池,利用有限元分析软件建立其声学特征模型,对光声池的共振频率、谐振腔内的声压分布进行仿真。根据乙炔(C_(2)H_(2))气体在近红外区吸收谱线的分布,选取1532.83 nm作为C_(2)H_(2)的测量谱线,采用可调谐分布式反馈(DFB)半导体激光器作为光源。利用法布里-珀罗(F-P)光纤声波传感器对声压信号进行采集,开展对椭球形光声池性能指标的测试。实验结果表明:椭球形光声池信噪比为34,检测极限灵敏度达到1.47×10^(-9),品质因数为45.5。由此得出,该结构提高了系统的灵敏度,使光声池的性能有了明显提升,有助于提高光声光谱法痕量气体的检测灵敏度。A new type of ellipsoidal resonant photoacoustic cell is proposed.The finite element analysis software is used to establish the acoustic characteristic model of the cell,and the resonance frequency,the sound pressure distribution in the resonant cavity of the novel photoacoustic cell are calculated.According to the distribution of the absorption line of acetylene gas in the near infrared region,1532.83 nm is selected as the measurement line of acetylene,and a tunable distributed feedback(DFB)semiconductor laser is selected as the light source.Fabry-Perot(F-P)fiber optic acoustic sensor is used to collect the sound pressure signal,and the performance indicators of the ellipsoidal photoacoustic cell are tested.The experimental results show that the signal-to-noise ratio of the ellipsoidal photoacoustic cell is 34,the detection limit sensitivity reaches 1.47×10^(-9),and the quality factor is 45.5.So it seems that the sensitivity of the system and the performance have been improved significantly by using the proposed structure,which helps to improve the sensitivity of photoacoustic spectroscopy for trace gas detection.

关 键 词：光谱学 椭球形共振光声池 光声光谱 乙炔 灵敏度 

分 类 号：O433.5[机械工程—光学工程]