磁粉检测灵敏度槽深的显微干涉检测方法研究  

Interference Detection Method for Groove Depth of Magnetic Particle Testing Sensitivity Shims

作　　者：古耀达 何冠婷 张兢 杨昭信 邝俊杰 GU Yaoda;HE Guanting;ZHANG Jing;YANG Zhaoxin;KUANG Junjie

机构地区：[1]广州计量检测技术研究院,广东广州510030

出　　处：《计量与测试技术》2021年第9期58-60,64,共4页Metrology & Measurement Technique

基　　金：国家市场监督管理总局科技计划项目(项目编号:2020MK126)。

摘　　要：磁粉检测标准灵敏度微米槽深的校准检测是长度计量检测的一项难点。目前,开展磁粉检测标准灵敏度微米槽深溯源的计量部门不多,已开展的仍使用接触式位移传感方式来磁粉检测标准灵敏度片离散的槽深度值,检测难度较大。本文介绍了一种用非接触的显微干涉测头代替接触式传感测头,利用GUIDE开发控制人机界面,建立硬件通信机制,实现智能化光干涉检测标准灵敏度微米槽深检测的方法。The calibration of standard sensitivity of magnetic particle testing and micron groove depth is a difficulty in length measurement and testing.At present,there are few metrological departments to trace the micron groove depth of the standard sensitivity of magnetic particle testing.The contact displacement sensing method is still used to detect the discrete groove depth of the standard sensitivity piece of magnetic particle testing,which is difficult to detect.In this paper,a non-contact micro interference probe is used to replace the in-situ displacement sensing probe,the man-machine interface is developed and controlled by GUIDE,the hardware communication mechanism is established,and the micron groove depth detection with standard sensitivity of intelligent optical interference detection is realized.

关 键 词：显微干涉 磁粉检测 标准灵敏度 微米槽深 

分 类 号：TB9[一般工业技术—计量学]