陀螺仪气浮轴承间隙测量系统  

Clearance Measurement System for the Air Bearing of Gyroscope

作　　者：任同群[1,2] 王晓飞 江海川 徐兴辉 王晓东[1,2] Ren Tongqun;Wang Xiaofei;Jiang Haichuan;Xu Xinghui;Wang Xiaodong(Key Laboratory for Micro/Nano Technology and System of Liaoning Province,Dalian University of Technology,Dalian,Liaoning 116024,China;Key Laboratory for Precision and Non-traditional Machining Technology of Ministry of Education,Dalian University of Technology,Dalian,Liaoning 116024,China)

机构地区：[1]大连理工大学微纳米技术及系统辽宁省重点实验室,辽宁大连116024 [2]大连理工大学精密与特种加工技术教育部重点实验室,辽宁大连116024

出　　处：《机电工程技术》2021年第9期90-94,120,共6页Mechanical & Electrical Engineering Technology

基　　金：辽宁省自然科学基金项目(编号:2020-MS-104);中央高校基本科研业务费专项资金项目(编号:DUT20LAB109)。

摘　　要：为实现陀螺仪动压马达气浮轴承内部间隙的精确、快速测量,研制了一套自动化测量系统。通过施加外力将轴承内部间隙转化为外部微位移,应用多测头相对测量方法间接获得内部间隙。系统中嵌入3个微力传感器,实现施力过程的闭环控制,保证力的连续、精确加载。采用自动翻转机构,实现径向、轴向间隙测量状态的自动转换,完成连续测量。为克服零件装夹中存在定转子相对倾斜而导致间隙转化不正确的问题,在轴向夹持部分引入柔性连接结构,同时利用转子体自重实现其与定子轴的自动找正,在测量过程中基于接触力和位移的双重反馈,实现零件平衡的自动精确调整,以保证内部间隙的正确转化。经实验验证,该系统测量精度在0.3μm以内,能够满足测量技术要求。To realize the accurate and rapid measurement of the internal clearance for the air bearing of the dynamic pressure gyroscope motor,an automatic measurement system was developed.By applying external force,the internal clearance of the bearing was converted into external micro displacement,and the internal clearance was obtained indirectly by using the relative measurement method.Three micro-force sensors were integrated toachieve the closed-loop control of the force application process,so as to ensuring the continuous and accurate force loading.An automatic turning mechanism was adopted to realize the conversion of radial and axial clearance measurement automatically.In order to overcome the problem of incorrect clearance conversion caused by the relative tilt of the stator and rotor during clamping,a flexible connection device was introduced in the axial clamping part,and at the same time,the rotor and stator could be aligned automatically due to the self-weight of the rotor.Based on the double feedback of contact force and displacement,the balance of parts could be adjusted automatically to ensure the correct conversion of internal clearance in the process of measurement.The experimental results show that the measurement accuracy of the system was within 0.3μm,which could satisfy the requirements of the measurement.

关 键 词：气浮轴承 陀螺仪 间隙测量 自适应调整 

分 类 号：TP23[自动化与计算机技术—检测技术与自动化装置] TB921[自动化与计算机技术—控制科学与工程]