基于MEMS的距离自适应型非接触静电仪  

A Daptive-distance Noncontact Electrostatic Meter Based on MEMS Technology

作　　者：闻小龙 杨鹏飞 储昭志 彭春荣 刘宇涛 吴双 WEN Xiaolong;YANG Pengfei;CHU Zhaozhi;PENG Chunrong;LIU Yutao;WU Shuang(Department of Physics,University of Science and Technology Beijing,Beijing Engineering Research Center of Detection and Appli-cation for Weak Magnetic Field,Beijing 100083,China;School of Applied Science,Beijing Information Science and Technology University,Beijing 100192,China;Institute of Microelectronics of Chinese Academy of Sciences,Beijing 100029,China;Aerospace Information Research Institute,Chinese Academy of Sciences,State Key Laboratory of Trans-ducer Technology,Beijing 100190,China;Beijing TFlying Transducer Technology Co.Ltd.,Beijing 100083,China)

机构地区：[1]北京科技大学数理学院北京市弱磁检测及应用工程技术研究中心,北京100083 [2]北京信息科技大学理学院,北京100192 [3]中国科学院微电子研究所,北京100029 [4]中国科学院空天信息创新研究院传感技术国家重点实验室,北京100190 [5]北京中科飞龙传感技术有限责任公司,北京100083

出　　处：《电子与信息学报》2021年第10期3068-3074,共7页Journal of Electronics & Information Technology

基　　金：国家重点研发计划(2018YFF01010800);国家自然科学基金(62031025);中央高校基本科研业务费专项资金(FRF-TP-19-045A2,FRF-BD-19-017A,FRF-BD-20-12A)。

摘　　要：静电场测量是检测物体是否携带过量静电最直接的手段,对于静电防护具有重要意义。传统的静电仪主要依赖固定距离测量,在被测物难以维持静止或不容易靠近时,距离改变引起灵敏度变化,造成测量误差。该文基于微机电系统电场传感器,提出一种可根据测试距离自适应调整灵敏度的静电测量思路:通过超声波模块测量被测物的距离,然后通过单片机查找对应的灵敏度系数,结合电场测试结果计算被测电压。针对研制的静电仪,该文提出基于实验室标定及现场标定相结合的校准方法,搭建了动态灵敏度标定系统,计算出不同测试距离、不同被测物尺寸的传感器灵敏度系数对应关系。与定距测量的传统静电仪相比,该文通过灵敏度动态标定,实现了更精确的非接触表面静电压测量;采用微机电系统电场敏感元件,具有体积小、功耗低、易集成、可批量化制备等优点,封装后无裸露可动部件,可靠性高。经第三方计量检测,在不同测试距离下的平均误差为–2.98%。Electrostatic field measurement is the most direct method to detect whether an object carries excessive static charge.Traditional electrostatic meters mainly rely on fixed distance measurement.While the measured object is difficult to maintain still or not easy to approach,the distance change causes a sensitivity change and results in a measurement error.Based on the micro-machined electric field sensor,this paper proposes an electrostatic measurement idea that the meter adjusts the sensitivity adaptively according to the tested distance:measure the distance of the object through the ultrasonic module,to find the corresponding sensitivity coefficient through the microprocessor,and then to calculate the measured voltage accompany the electric field result.For the developed meter,this paper proposes a calibration method based on a combination of laboratory calibration and site calibration,builds a dynamic sensitivity calibration system,and calculates the corresponding relation of sensor sensitivity coefficients of different test distances and different measured object sizes.Compared with the conventional measurements in a fixed distance,this paper achieves more accurate non-contact surface static voltage measurement by means of sensitivity dynamic calibration.In the meanwhile,the micro electric field sensing element has the advantages of small size,low power consumption,easy integration,and capable of mass manufacturing.According to the third-party test,the average error at different test distances is-2.98%.

关 键 词：静电仪 微机电系统 电场传感器 静电压 动态标定 

分 类 号：TP212.1[自动化与计算机技术—检测技术与自动化装置]