偏振敏感双机制增强近红外GeSn等离型光电探测器设计(特邀)  

Design of Polarization-sensitive Infrared GeSn Plasmonic Photodetectors Enhanced by Dual Absorption Mechanism(Invited)

作　　者：韩钊 张蓓 张峻铭 苑西西 张宁宁 孙浩[1] 王利明 胡辉勇[1] HAN Zhao;ZHANG Bei;ZHANG Junming;YUAN Xixi;ZHANG Ningning;SUN Hao;WANG Liming;HU Huiyong(School of Microelectronics,Xidian University,Xi'an 710071,China)

机构地区：[1]西安电子科技大学微电子学院,西安710071

出　　处：《光子学报》2021年第10期225-232,共8页Acta Photonica Sinica

基　　金：National Key Research and Development Program of China(No.2019YFB2204400);the Industry-University-Academy Cooperation Program of Xidian University-Chongqing IC Innovation Research Institute(No.CQIRI-2021CXY-Y11);。

摘　　要：为了解决GeSn光电探测器反应能力不足和信号噪声比差等方面的不足,提出一种偏振敏感的双机制增强的GeSn光电探测器。该光电探测器同时具有法布里-珀罗模式和表面等离激元模式,其中,GeSn薄膜和二氧化硅薄膜提供了法布里-珀罗模式,而表面等离激元来源于附加在GeSn表面的Au光栅。模拟结果表明,该双机制增强的GeSn光电探测器将2000 nm波长处的光学吸收率由20%提高到80%。此外,在2000 nm时,TM光及TE光吸收率分别为80%和2.6%,消光比为31。高消光比表明该结构具有良好的偏振选择性。这些结果为新型GeSn光电探测器的开发提供了思路。The GeSn photodetectors(PDs)have drawbacks such as the slow response speed and the poor signal-to-noise ratio. To overcome these disadvantages, we report one polarization-sensitive dualmechanism-enhanced GeSn PD that contains both Fabry-Pérot(F-P) mode and Surface Plasmon Polaritons(SPP)mode. The F-P mode originates from the GeSn film assisted by an embedded SiO2 film,while the SPP mode is associated to the added Au grating on the GeSn film. Simulation results show that these two types of modes can increase the optical absorption of GeSn from 20% to 80% at 2 000 nm.Moreover,under TM/TE polarization,absorption of the sample are 80% and 2.6%,respectively,and the extinction ratio is 31. Such a high extinction ratio indicates that the GeSn PD has great polarization selectivity. These results provide new ideas for the development of innovative GeSn PDs.

关 键 词：法布里-珀罗 表面等离激元 光栅 光电探测器 偏振 

分 类 号：TN21[电子电信—物理电子学] TN362