抗反射膜对衍射光学元件衍射效率的影响分析  

Effect of Antireflection Films on Diffraction Efficiency of Diffractive Optical Element

作　　者：杨亮亮[1] 夏寅聪 陆玉灿 YANG Liangliang;XIA Yincong;LU Yucan(School of Physics and Electronics Engineering,Yancheng Teachers University,Yancheng 224007,China)

机构地区：[1]盐城师范学院物理与电子工程学院,江苏盐城224007

出　　处：《红外技术》2021年第10期930-933,共4页Infrared Technology

基　　金：江苏省高校自然科学研究项目(19KJD140005)。

摘　　要：针对抗反射膜引入的附加位相,分析了衍射光学元件的衍射效率,提出了含有抗反射膜的衍射光学元件的优化设计方法。以工作在可见光波段的衍射光学元件为例,对比分析了采用传统方法和优化方法设计的衍射光学元件的衍射效率。结果表明:抗反射膜对衍射光学元件的衍射效率和带宽积分平均衍射效率的影响是不可忽略的。针对正入射和30°斜入射两种工作状态,采用优化设计方法得到的衍射光学元件的带宽积分平均衍射效率高于94%。The diffraction efficiency of a diffractive optical element(DOE)was analyzed with an additional phase introduced by an antireflection film,and the optimum design method of a DOE with an antireflection film was proposed.For a DOE working within the visible waveband,the diffraction efficiency was compared and analyzed using the proposed optimal method and traditional method.The results showed that the influence of the antireflection film on the diffraction efficiency and the bandwidth integral average diffraction efficiency(BIADE)of the DOE is not negligible.For the two working states of normal incidence and 30°oblique incidence,the BIADE of the DOE obtained by the optimal design method was higher than 94%.

关 键 词：衍射光学元件 增透膜 斜入射 衍射效率 

分 类 号：O439[机械工程—光学工程]