光栅式双层悬臂梁结构设计与闭环反馈控制  

Grating-Based Double-Layer Cantilever Structure Design and Closed-Loop Feedback Control

作　　者：陶新[1] 欧卫林[1] 何文波[1] TAO Xin;OU Wei-lin;HE Wen-bo(Huazhong Institute of Electro-Optics-Wuhan National Laboratory for Optoelectronics,Wuhan 430223,China)

机构地区：[1]华中光电技术研究所—武汉光电国家研究中心,湖北武汉430223

出　　处：《光学与光电技术》2021年第4期45-54,共10页Optics & Optoelectronic Technology

摘　　要：加速度计在地球物理、惯性导航、油气勘探和地震检波等多个领域有广泛的应用,基于微光栅MEMS加速度计具有抗电磁干扰、高精度、易集成、体积小、重量轻等优势。针对微光栅加速度计受到交叉轴串扰导致的测量精度不高的问题,提出了一种基于双器件层SOI基片制备敏感结构设计及其闭环控制方法,通过采用Comsol有限元仿真分析可知,该设计理论上,当上下层悬臂梁厚度差为0.5μm时,交叉轴串扰仅为0.01%,同时结构的敏感轴与非敏感轴的模态分离比传统结构提升了5.3倍,有效提高了敏感结构抗高阶机械模态扰动的能力。在此基础上,分析了静电力和磁电反馈的特点,并根据器件自身结构和电气特性,采用磁电反馈方式以增大线性范围。Micro-grating accelerometers have the advantages of anti-electromagnetic interference,high precision,low power consumption,small volume and so on. They have wide application prospects in the fields of geophysics,gravity assisted navigation,oil and gas exploration and seismic detection. In order to suppress cross-axis interference,the design of a highly symmetric micro-electro-mechanical system sandwich accelerometer using a double-device-layer silicon-oninsulator(D-SOI)wafer is introduced in this paper. The COMSOL finite element simulation analysis shows that cross-axis sensitivity is only 0.01% when the double-device-layer thickness difference is 0.5 μm. The modal separation radio is increased by 5.3 times compared with traditional structures,which effectively improves the resistance to high-order mechanical modal disturbance. Based on this design,the features of static and magnetoelectric feedback methods are discussed. According to the structure and electrical specifications,magnetoelectric feedback method is adopted to improve the linearity range.

关 键 词：加速度测量 悬臂梁 交叉轴串扰 有限元仿真 闭环反馈控制 磁电反馈 

分 类 号：TP273[自动化与计算机技术—检测技术与自动化装置]