一种离轴凸非球面补偿器的研究  

Study on An Off-Axis Convex Aspheric Compensator

作　　者：夏志高 陈强[1] XIA Zhi-gao;CHEN Qiang(Institute of Optics and Electronics,Chinese Academy of Sciences,Chengdu 610209,China;University of Chinese Academy of Sciences,Beijing 100049,China)

机构地区：[1]中国科学院光电技术研究所,四川成都610209 [2]中国科学院大学,北京100049

出　　处：《光学与光电技术》2021年第4期73-79,共7页Optics & Optoelectronic Technology

基　　金：国家重大国防预研(A19k××××)资助项目。

摘　　要：凸非球面,尤其是离轴凸非球面的光学检验一直是非球面加工中的难点。针对离轴凸非球面光学元件加工检验困难的问题,研究了一种改进的Hindle方法,解决了经典的透射式Hindle方法需要大口径辅助弯月透镜等不足。针对大口径离轴凸非球面的检测,设计了一个特殊结构的补偿器组,并对补偿器的加工和装调进行分析、仿真和优化,对整个补偿检测系统进行公差分析,并给出了相应的结果,同时也可以把此设计推广到更大口径的离轴凸非球面镜的面形检测中去。Optical inspection of convex aspheric surfaces,especially off-axis convex aspheric surfaces,is always a difficult point in aspheric surface machining.A modified Hindle method is developed to solve the problem of machining inspection of convex aspheric optical elements,which is difficult to solve the deficiency of the classical Hindle method,such as the need of large aperture auxiliary spherical mirror and the presence of center occlusion.In this paper,a compensator set with special structure is designed for the detection of large diameter off-axis convex aspheric surfaces,and the processing and adjustment of compensators are analyzed,and the simulation optimization and tolerance analysis are carried out for the whole compensation detection system.Meanwhile,this design can be extended to the detection of larger diameter convex aspheric surfaces.

关 键 词：光学检测 光学设计 离轴凸非球面 非球面加工 面形检测 

分 类 号：TH741[机械工程—光学工程]