光弹调制器谐振特性的研究及验证  

Research and Verification on Resonance Characteristics of Photoelastic Modulator

作　　者：武燕婷 熊伟[2,3] 李超波 胡震恒[1] 田飔莹 Wu Yanting;Xiong Wei;Li Chaobo;Hu Zhenheng;Tian Siying(School of Microelectronics,University of Chinese Academy of Sciences,Beijing 100049,China;Institute of Microelectronics of Chinese Academy of Sciences,Beijing 100029,China;State Key Laboratory of Applied Optics,Changchun Institute of Optics,Fine Mechanics and Physics,Chinese Academy of Sciences,Changchun,Jilin130033,China)

机构地区：[1]中国科学院大学微电子学院,北京100049 [2]中国科学院微电子研究所,北京100029 [3]中国科学院长春光学精密机械与物理研究所应用光学国家重点实验室,吉林长春130033

出　　处：《光学学报》2021年第15期197-205,共9页Acta Optica Sinica

基　　金：应用光学国家重点实验室资助项目(SKLAO-201916);中国科学院合肥大科学中心“高端用户培育基金”(2019HSC-UE011)。

摘　　要：光弹调制器(PEM)是一种广泛应用于光学检测的光调制器件,其利用压电晶体的逆压电效应来周期性改变光弹晶体内部的折射率,从而实现对通过光弹晶体的光信号的相位调制。当系统处于谐振状态时,PEM的调制效率最高。因此,谐振频率和表征其工作效率的品质因子是PEM的两个重要参数。为了研究PEM的谐振特性,设计了一款目标频率在50 kHz附近的二维八角对称结构PEM并进行了理论和实验验证,同时提出一种基于阻抗分析的PEM谐振特性测量方法。首先建立频率模型进行分析以得到目标PEM的理论参数,再通过数值仿真软件进行理论验证,最终完成了两组PEM样品的制备。此外,还基于阻抗分析方法对样品的谐振特性进行了实验验证,测得样品的谐振频率分别为52.363 kHz和52.353 kHz,品质因子分别为5071.2和6096.7。Photoelastic modulator(PEM) is a kind of light modulator widely used in optical detection, which uses inverse piezoelectric effect of piezoelectric crystal to periodically change refractive index inside photoelastic crystal to realize phase modulation of optical signal passing through photoelastic crystal. PEM has the highest modulation efficiency when the system is in a resonant state. Therefore, resonant frequency and quality factor representing its working efficiency, are two important parameters of PEM. To study the resonance characteristics of PEM, we design a two-dimensional octagonal symmetric structure PEM with target frequency near 50 kHz and verify it theoretically and experimentally. At the same time, we propose a PEM resonance characteristic measurement method based on impedance analysis. In this paper, the theoretical parameters of the target PEM are obtained by establishing a frequency model for analysis, and then theoretical verification is carried out by numerical simulation software. Finally, two groups of PEM samples are prepared. In addition, the resonance characteristics of the samples are experimentally verified based on the impedance analysis method. The measured resonant frequencies of the sample PEMs are 52.363 kHz and 52.353 kHz, and the quality factors are 5071.2 and 6096.7, respectively.

关 键 词：调制器 光弹调制器 阻抗分析 谐振频率 品质因子 

分 类 号：TH741[机械工程—光学工程]