MEMS红外转换薄膜光驱动技术研究  

Light-Driven Technology Based on MEMS Infrared Conversion Films

作　　者：张晓乐 李卓[1,2] 高彦泽 施蕊 宋健[1,2] 时庆峰 李霁恬 张思晨 Zhang Xiaole;Li Zhuo;Gao Yanze;Shi Rui;Song Jian;Shi Qingfeng;Li Jitian;Zhang Sichen(School of Optics and Photonics,Beijing Institute of Technology,Beijing 100081,China;Beijing Key Laboraory for Precision Optoelectronic Measurement Instrument and Technology,Beijing 100081,China)

机构地区：[1]北京理工大学光电学院,北京100081 [2]精密光电测试仪器及技术北京市重点实验室,北京100081

出　　处：《光学学报》2021年第15期243-251,共9页Acta Optica Sinica

基　　金：中国博士后科学基金(2020TQ0036)。

摘　　要：微机电系统(MEMS)红外转换薄膜可将写入光图像转换为红外图像,已被广泛应用于红外目标模拟器。红外焦平面探测器与红外目标模拟器对接时,探测器的积分时间必须大于红外图像的显示时间,这样才能采集到红外图像的全部灰度等级。提出一种基于MEMS红外转换薄膜的光驱动技术,利用薄膜的热惰性对写入光图像的能量进行积分,进而降低对红外探测器积分时间的要求。对薄膜在光驱动状态下的温度特性进行仿真和实验测试,结果表明:薄膜生成的红外图像的灰度值与写入光图像的灰度值呈线性关系。红外图像的升温时间为9 ms,保持时间为1 ms,降温时间为10 ms,探测器通过对保持时间内任意时间段的积分,能够得到256位灰阶的红外图像。红外图像的温升最大值为112 K,单位灰度值对应的温度分辨率为0.44 K。Micro-electro-mechanical system(MEMS) infrared conversion film, which can convert write visible light images into infrared images, is widely used in infrared target simulators. When an infrared focal plane detector is docking with an infrared target simulator, the integration time of detector must be greater than the display time of infrared image to collect all the gray scales of infrared image. A light-driven technology based on MEMS infrared conversion film is proposed in this paper. Energy of write visible light image is integrated with thermal inertia of the film, which reduces requirement for integration time of infrared detector. Temperature characteristics of the film in the light-driven state are simulated and tested. Results show that the gray value of infrared image generated by the film is linearly related to that of write visible light image. The infrared image has heating time of 9 ms, keeping time of 1 ms, and cooling time of 10 ms. The detector can get a 256 gray-scale infrared image by integrating for any period during keeping time. The maximum temperature rise of infrared image is 112 K, and the temperature resolution corresponding to the unit gray value of infrared image is 0.44 K.

关 键 词：薄膜 红外图像 灰度等级 光驱动 转换薄膜 目标模拟器 

分 类 号：TN216[电子电信—物理电子学]