激光干涉精密测量与应用  

Precision Measurement and Applications of Laser Interferometry

作　　者：谈宜东[1] 徐欣[1] 张书练[1] Tan Yidong;Xu Xin;Zhang Shulian(Shulian State Key Laboratory of Precision Measurement Technology and Instruments,Department of Precision Instruments,Tsinghua University,Beijing 100084,China)

机构地区：[1]清华大学精密仪器系,精密测试技术及仪器国家重点实验室,北京100084

出　　处：《中国激光》2021年第15期222-243,共22页Chinese Journal of Lasers

基　　金：国家自然科学基金(51722506);国家重点研发计划(2020YFC2200204);高精度XXX仪;高稳定XXX器。

摘　　要："没有测量就没有科学",对物理量越来越精确的测量已成为现代科学和技术领域孜孜追求的目标。激光干涉精密测量具有可溯源,纳米甚至皮米高分辨率,以及数米、几千米甚至上千千米的超长测量范围等突出优点,被广泛用于IC装备、数控机床、超精密微纳制造、引力波探测等先进技术和前沿科学领域。清华大学激光精密测量与应用课题组长期围绕激光干涉和激光回馈干涉开展研究,先后在大频差、高功率保持的新原理双频激光器、用于无靶镜纳米测量的回馈干涉原理研究方面取得了突破,研制出新型双频激光干涉仪和激光回馈干涉仪,并在多个领域开展了应用研究。本文详细总结了课题组最近十年的研究成果,在此基础上展望了激光干涉精密测量与应用研究领域的发展前景。Significance There is no science without measurement.More accurate measurement of physical quantities is highly desired in modern science and technologies.Laser interferometric precision measurements have outstanding advantages,including traceability,nanometer or even picometer resolution,and ultralong measuring range up to several meters,kilometers,or even thousands of kilometers.It is widely used in advanced technologies and frontier research,such as IC devices,CNC machines,ultraprecision micromanufacturing,and gravitational wave detection.However,laser interferometric precision measurements have many key problems that demand urgent solutions.The most crucial one is that the laser source requires to be independent,whereas the current domestic market cannot produce satisfactory dual-frequency lasers for heterodyne interferometry.Traditional laser sources have frequency differences lower than 3 MHz,which limits the maximum measuring speed.This severely restricts the processing efficiency of IC chips or machine tools.Furthermore,the output power of the widely used lasers is only 0.5 mW,which is low for further multidimensional measurements.More importantly,dual-frequency lasers exhibit a nonlinear error of several nanometers,thus affecting the precision of the interferometers.For example,the Agilent dual-frequency interferometer has a nonlinear error of 3 nm [Fig.10(a)].When it is used for collimation at the precise location of machine tools,this error is considered in the final precision evaluation.Another troublesome problem is that,to generate an interference signal with a high signal-to-noise ratio,traditional laser heterodyne interferometry requires a target mirror or highly reflective surface of the test object to reflect a sufficiently strong beam.However,in many cutting-edge science and ultraprecision applications,a target mirror cannot be placed on the test object and the measured surface is not highly reflective,such as flexible film deformable mirrors for laser fusion,thermal and gravitational deformati

关 键 词：激光光学 精密测量 激光干涉 激光回馈 计量应用 

分 类 号：TB96[机械工程—光学工程]