K波段宽带声体波延迟线的设计与优化  

Design and Optimization of K-Band Wide Bandwidth Bulk Acoustic Wave Delay Line

作　　者：戴明月 郑泽渔[1] DAI Mingyue;ZHENG Zeyu(The 26th Institute of China Electronics Technology Group Corporation, Chongqing 400060, China)

机构地区：[1]中国电子科技集团公司第二十六研究所,重庆400060

出　　处：《压电与声光》2021年第5期613-615,共3页Piezoelectrics & Acoustooptics

摘　　要：通过优化K波段声体波换能器设计,突破200 nm极薄压电薄膜制备和微带线匹配等技术,研制了K波段体声波延迟线样品。研究结果表明,样品的中心频率大于23 GHz,带宽大于1000 MHz,延迟时间295 ns,外形尺寸约25 mm×16 mm×14 mm,是目前国内外已报道的工作频率最高的声体波延迟线。By optimizing the design of K-band bulk acoustic wave transducer,and breaking through the 200 nm ultra-thin piezoelectric film deposition and microstrip line matching technologies,a prototype of bulk acoustic wave delay line operating at K-band has been developed in this work.The research results show that the center frequency of the prototype is greater than 23 GHz,the bandwidth is greater than 1000 MHz,the delay time is 295 ns and the overall size is about 25 mm×16 mm×14 mm.The bulk acoustic wave delay line has the highest operating frequency reported at home and abroad.

关 键 词：延迟线 声体波(BAW) 压电薄膜 换能器 

分 类 号：TN65[电子电信—电路与系统]