压电陶瓷频率响应及振动面幅值激光外差测量  

Laser Heterodyne Measurement of Frequency Response and Amplitude of Vibrating Surface of Piezoelectric Ceramics

作　　者：王凯旋 武俊峰[1] 舒风风 WANG Kaixuan;WU Junfeng;SHU Fengfeng(Changchun Institute of Optics, Fine Mechanics and Physics, Chinese Academy of Science, Changchun 130033,China;University of Chinese Academy of Sciences,Beijing 100049,China)

机构地区：[1]中国科学院长春光学精密机械与物理研究所,吉林长春130033 [2]中国科学院大学,北京100049

出　　处：《压电与声光》2021年第5期680-683,704,共5页Piezoelectrics & Acoustooptics

基　　金：南京市科技创新基金资助项目(20200406kc)。

摘　　要：压电陶瓷已广泛应用于检测、通讯等各个领域。该文采用外差式激光干涉测量法,开展了压电陶瓷振动特性研究。首先给出了激光外差干涉测振仪测试压电陶瓷振动特性的测量方法,并通过实验测得了压电陶瓷片单点振动的频率响应曲线,同时测量了径向直线上若干点的振动频响曲线,进而进行了整个压电陶瓷圆环表面在其谐振频率点的振动测量。实验结果表明,实测压电陶瓷片的谐振频率为30710 Hz,与其产品标定值30000 Hz存在710 Hz偏差。其圆环表面振动的振型具有不对称性,这对压电陶瓷的应用设计提供了指导意义。The piezoelectric ceramics have been widely used in various fields such as detection and communication.In this paper,a heterodyne laser interferometry method is used to study the vibration characteristics of piezoelectric ceramics.First,the method of measuring the vibration characteristics of piezoelectric ceramics by a laser heterodyne interferometer is introduced,and the frequency response curve of single-point vibration of piezoelectric ceramics is obtained through the experimental measurement.At the same time,the frequency response curves of several points on a radial line are also measured,and then the vibration measurement of the entire piezoelectric ceramic ring surface at its resonant frequency point is carried out.The experimental results show that the measured resonant frequency of the piezoelectric ceramic is 30710 Hz,which has a 710 Hz deviation from the product calibration value of 30000 Hz,and the vibration mode of the ring surface vibration is asymmetric.The study provides guidance for the application design of piezoelectric ceramics.

关 键 词：激光干涉仪 压电陶瓷 外差检测 振动分析 频率响应 信号处理 

分 类 号：TN29[电子电信—物理电子学] TH744.3[机械工程—光学工程]