基于T形阳极GaAs肖特基二极管薄膜集成电路工艺的664 GHz次谐波混频器  

664 GHz sub harmonic mixer based on“T”anode GaAs SBD membrane circuit

作　　者：牛斌[1,2] 钱骏 范道雨 王元庆 梅亮[1,3] 戴俊杰 林罡[1,2] 周明 陈堂胜 NIU Bin;QIAN Jun;FAN Dao-Yu;WANG Yuan-Qing;MEI Liang;DAI Jun-Jie;LIN Gang;ZHOU Ming;CHEN Tang-Sheng(Science and Technology on Monolithic Integrated Circuits and Modules Laboratory,Nanjing Electronic Devices Institute,Nanjing 210016,China;Nanjing Chip Valley Industrial Technology Institute,Nanjing 210016,China;Nanjing Antaixin Electornic Co.Ltd.,Nanjing 210016,China)

机构地区：[1]南京电子器件研究所微波毫米波单片集成和模块电路重点实验室,江苏南京210016 [2]南京中电芯谷高频器件产业技术研究院有限公司,江苏南京210016 [3]南京安太芯电子有限公司,江苏南京210016

出　　处：《红外与毫米波学报》2021年第5期634-637,共4页Journal of Infrared and Millimeter Waves

基　　金：Supported by the national key R&D program of China(2018YFF0109301)。

摘　　要：报道了用于冰云探测的基于0.5μm T形阳极砷化镓肖特基二极管薄膜集成电路工艺664 GHz次谐波混频器。为降低器件寄生参数,提升太赫兹频段电路性能,设计并分析了了T形阳极GaAsSBD器件结构,开发了厚度仅5μm的薄膜电路工艺。混频器芯片组装成664 GHz接收模块,经测试室温下664 GHz最小双边带变频损耗达到9.9 dB。664 GHz sub harmonic mixer for ice cloud detection was designed and fabricated,based on 0.5μm“T”anode GaAs SBD membrane integrated process with thickness of 5μm.Parasitic parameters of“T”anode de⁃sign were analyzed and membrane process was developed to improve high frequency performance.The mixer was characterized in 664 GHz receiver setup.Double side band conversion loss of the mixer was 9.9 dB at 664 GHz room temperature.

关 键 词：砷化镓肖特基二极管 薄膜电路 次谐波混频器 

分 类 号：TN304.2[电子电信—物理电子学] TN315.3