基于微型压缩机的高精度紫外激光器温控研究  

Research on high precision temperature control of ultraviolet laser based on micro compressor

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作  者:熊伟国 朱元成 XIONG Wei-guo;ZHU Yuan-cheng(Shenzhen Coolingstyle Technology Co.,Ltd.,Shenzhen 518000,China;Tsinghua Shenzhen International Graduate School,Shenzhen 518000,China)

机构地区:[1]深圳市酷凌时代科技有限公司,广东深圳518000 [2]清华大学深圳国际研究生院,广东深圳518000

出  处:《激光与红外》2021年第10期1321-1326,共6页Laser & Infrared

摘  要:温度对全固态紫外激光器的输出特性起着至关重要的作用。为了使全固态紫外激光器输出稳定,需要对其进行精确的温度控制,本文主要介绍一种基于蒸气压缩式变频制冷系统和电热补偿的温度控制方法实现对紫外激光器的高精度温控,该方法采用PID作为基本控制算法,对微型直流变频压缩机转速和电热功率进行控制,从而实现恒温系统兼具体积小、重量轻、效率高、温控好等特点。实验结果表明:该方法响应速度快,仅需6 min就能使系统达到稳定;控制精度高,水温精度最高能达到0.01℃。随着紫外激光器在打标、精密切割等行业的大量应用,该方法兼具诸多优势,具有很高的实用价值和推广意义。Temperature plays an important role in the output characteristics of all solid-state ultraviolet lasers.In order to stabilize the output of all solid-state UV laser,it is necessary to control its temperature accurately.This paper mainly introduces a temperature control method based on vapor compression variable frequency refrigeration system and electrothermal compensation to realize high-precision temperature control of UV laser.The method uses PID as the basic control algorithm to control the speed of the micro DC variable frequency compressor and the electrothermal power,so as to realize the constant temperature system with the characteristics of small volume,light weight,high efficiency and good temperature control.Experimental results show that the method has a fast response speed,and it only takes 6 minutes to stabilize the system;the control accuracy is high,and the water temperature accuracy can reach 0.01℃.Based on the UV laser will be used more and more in marking,precision cutting and many other industries,this method should be more popularized because of its advancement and practicality.

关 键 词:紫外激光器 微型压缩机 变频控制 电热补偿 PID控制 

分 类 号:TN248[电子电信—物理电子学]

 

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